Invention Grant
- Patent Title: Apparatus with a high heat capacity and method for producing the same
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Application No.: US15957349Application Date: 2018-04-19
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Publication No.: US10377626B2Publication Date: 2019-08-13
- Inventor: Bernd Goller , Matthias Steiert
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Priority: DE102017206744 20170421
- Main IPC: H01L23/02
- IPC: H01L23/02 ; B81B7/00 ; B81C1/00 ; H04R19/04 ; H04R1/08 ; H04R19/00

Abstract:
The present disclosure relates to an apparatus comprising a substrate, wherein a MEMS module is arranged on a first side of the substrate, the output signal from said MEMS module changing in the event of a change in temperature. Furthermore, the apparatus has a housing structure which is arranged on a first side of the substrate and has a recess in which the MEMS module is arranged. The apparatus also has a layer which is applied to the housing structure and increases the heat capacity of the apparatus. The present disclosure also relates to a method for producing an apparatus of this kind.
Public/Granted literature
- US20180305200A1 APPARATUS WITH A HIGH HEAT CAPACITY AND METHOD FOR PRODUCING THE SAME Public/Granted day:2018-10-25
Information query
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