Invention Grant
- Patent Title: Laminated ultra-high vacuum forming device
-
Application No.: US15322735Application Date: 2015-04-21
-
Publication No.: US10381204B2Publication Date: 2019-08-13
- Inventor: Shukichi Tanaka
- Applicant: NATIONAL INSTITUTE OF INFORMATION AND COMMUNICATIONS TECHNOLOGY
- Applicant Address: JP Tokyo
- Assignee: NATIONAL INSTITUTE OF INFORMATION AND COMMUNICATIONS TECHNOLOGY
- Current Assignee: NATIONAL INSTITUTE OF INFORMATION AND COMMUNICATIONS TECHNOLOGY
- Current Assignee Address: JP Tokyo
- Agency: Pyprus Pte Ltd
- Priority: JP2014-134301 20140630
- International Application: PCT/JP2015/062082 WO 20150421
- International Announcement: WO2016/002320 WO 20160107
- Main IPC: H01J41/12
- IPC: H01J41/12 ; F04B37/14 ; H01J41/18 ; H01J41/20

Abstract:
Provided is an ultra-high vacuum forming device containing an ion pump having a compact size in the central axis direction. The ultra-high vacuum forming device (1) is provided with at least one ion pump (100). The ion pump (100) is provided with: a casing (110) having at least one opening (111, 112); a board-shaped electrode group (120) formed by means of a central opening (120a) being formed along a predetermined central axis (C) disposed within the casing (110), and a plurality of electrodes (121) being joined with spaces therebetween; a pair of board-shaped electrodes (131, 132) having a different polarity than that of the electrode group (120) and that are disposed at positions sandwiching both sides of the electrode group (120) within the casing (110); and a pair of board-shaped magnets (141, 142) disposed at positions sandwiching both sides of the pair of board-shaped electrodes (131, 132).
Public/Granted literature
- US20170133210A1 Laminated Ultra-High Vacuum Forming Device Public/Granted day:2017-05-11
Information query