Laminated ultra-high vacuum forming device

    公开(公告)号:US10381204B2

    公开(公告)日:2019-08-13

    申请号:US15322735

    申请日:2015-04-21

    Inventor: Shukichi Tanaka

    Abstract: Provided is an ultra-high vacuum forming device containing an ion pump having a compact size in the central axis direction. The ultra-high vacuum forming device (1) is provided with at least one ion pump (100). The ion pump (100) is provided with: a casing (110) having at least one opening (111, 112); a board-shaped electrode group (120) formed by means of a central opening (120a) being formed along a predetermined central axis (C) disposed within the casing (110), and a plurality of electrodes (121) being joined with spaces therebetween; a pair of board-shaped electrodes (131, 132) having a different polarity than that of the electrode group (120) and that are disposed at positions sandwiching both sides of the electrode group (120) within the casing (110); and a pair of board-shaped magnets (141, 142) disposed at positions sandwiching both sides of the pair of board-shaped electrodes (131, 132).

    Forming Ion Pump Having Silicon Manifold
    2.
    发明申请

    公开(公告)号:US20180233338A1

    公开(公告)日:2018-08-16

    申请号:US15948465

    申请日:2018-04-09

    CPC classification number: H01J41/14 F04B37/14 H01J41/18

    Abstract: An ultra-high vacuum (UHV) system includes a UHV cell and an ion pump to maintain the UHV in the UHV cell. The ion pump has a GCC (glass, ceramic, or crystalline) housing. An interior wall of the ion-pump housing serves as an anode or bears a coating that serves as an anode. At least one cathode is disposed with respect to the housing so that it can cooperate with the anode to form an electric field for establishing a Penning trap. The GCC housing defines a flow channel that extends radially through the anode so that a molecule can flow directly into the most ionizing region of a Penning trap.

    Sputter ion pump
    3.
    发明申请

    公开(公告)号:US20100247333A1

    公开(公告)日:2010-09-30

    申请号:US11478421

    申请日:2006-06-28

    CPC classification number: F04B37/02 F04B37/14 H01J41/20

    Abstract: A sputter ion pump includes one vacuum chamber, two parallel anode poles and one cold cathode electron emitter. The vacuum chamber includes at least one aperture located in an outer wall thereof. The two parallel anode poles are positioned in the vacuum chamber and arranged in a symmetrical configuration about a center axis of the vacuum chamber. The cold cathode electron emission device is located on or proximate the outer wall of the vacuum chamber and faces a corresponding aperture. The cold cathode electron emission device is thus configured for injecting electrons through the corresponding aperture and into the vacuum chamber. The sputter ion pump produces a saddle-shaped electrostatic field and is free of a magnetic field. The sputter ion pump has a simplified structure and a low power consumption.

    Vacuum maintenance device for high vacuum chambers
    4.
    发明授权
    Vacuum maintenance device for high vacuum chambers 失效
    真空室真空维护装置

    公开(公告)号:US5655886A

    公开(公告)日:1997-08-12

    申请号:US469512

    申请日:1995-06-06

    CPC classification number: H01J29/94 F04B37/02 H01J41/18 H01J7/16

    Abstract: An ion pump permits the continuous evacuation of a small-envelope vacuum chamber while drawing a relatively small amount of power (micro watts). In a preferred embodiment, the present ion pump, due to its small size and integration within the vacuum chamber, enables the device in which the vacuum chamber is incorporated to be portable and to retain its original dimensions.

    Abstract translation: 离子泵允许在抽取相对较小量的功率(微瓦)的同时,连续抽真空小真空室。 在优选实施例中,本离子泵由于其小尺寸和集成在真空室内,使得其中结合有真空室的装置可移动并保持其原始尺寸。

    Piezo-electric film manufacture
    5.
    发明授权
    Piezo-electric film manufacture 失效
    压电电影制作

    公开(公告)号:US4340786A

    公开(公告)日:1982-07-20

    申请号:US115826

    申请日:1980-01-28

    Inventor: Norman W. Tester

    Abstract: A process for making piezo-electric polyvinylidene fluoride (PVDF) film for use, for example, as diaphragms for telephone transmitters, includes the steps of: (a) stretching the melt-extruded film parallel to the extrusion direction with a stretch ratio of about 4 to 1 at about 120.degree. C. to convert it to a .beta. crystalline form; (b) clamping the film between conductive rubber pads to which the polarizing voltage, e.g. 1.3 kv for 12 .mu.m film is applied. While the voltage is thus applied, the film is heated to about 110.degree. C. for 130 mins. and cooled to ambient with the polarizing filed preset; (c) conductive elastomer electrodes are applied to the film in the desired pattern; and (d) the piezo-electric properties are stabilized by heating the foil to about 90.degree. C. for 2 hours.

    Abstract translation: 用于制造例如用作电话发射器的隔膜的压电聚偏二氟乙烯(PVDF)膜的方法包括以下步骤:(a)以大约的拉伸比拉伸熔融挤出的膜与挤出方向平行的拉伸比 在约120℃下将其转化为β晶型; (b)将薄膜夹在极化电压例如导电橡胶垫之间。 施用1.3mv的12μm膜。 在施加电压的同时,将膜加热至约110℃,持续130分钟。 并用预定的极化场冷却至环境温度; (c)以期望的图案将导电弹性体电极施加到膜上; 和(d)通过将箔加热至约90℃2小时来稳定压电特性。

    Forming ion pump having silicon manifold

    公开(公告)号:US10460918B2

    公开(公告)日:2019-10-29

    申请号:US15948465

    申请日:2018-04-09

    Abstract: An ultra-high vacuum (UHV) system includes a UHV cell and an ion pump to maintain the UHV in the UHV cell. The ion pump has a GCC (glass, ceramic, or crystalline) housing. An interior wall of the ion-pump housing serves as an anode or bears a coating that serves as an anode. At least one cathode is disposed with respect to the housing so that it can cooperate with the anode to form an electric field for establishing a Penning trap. The GCC housing defines a flow channel that extends radially through the anode so that a molecule can flow directly into the most ionizing region of a Penning trap.

    Exhaust apparatus and vacuum pumping unit including the exhaust apparatus
    9.
    发明授权
    Exhaust apparatus and vacuum pumping unit including the exhaust apparatus 失效
    排气装置和真空泵单元包括排气装置

    公开(公告)号:US5240381A

    公开(公告)日:1993-08-31

    申请号:US833853

    申请日:1992-02-12

    CPC classification number: H01J41/18 H01J41/14

    Abstract: An exhaust apparatus and a high vacuum pumping unit including such high vacuum device and an auxiliary vacuum pump are disclosed, wherein a high vacuum is achieved in a vacuum vessel such that the gas molecules within the vacuum vessel are ionized and accelerated to be exhausted and, further, in the high vacuum pumping unit, those gas molecules diffused back or desorbed from the vacuum pump are ionized and accelerated to be returned to the vacuum pump.

    Abstract translation: 公开了一种包括这种高真空装置和辅助真空泵的排气装置和高真空泵送装置,其中在真空容器中实现高真空,使得真空容器内的气体分子被离子化并加速而被排出, 此外,在高真空泵送单元中,从真空泵向后扩散或解吸的那些气体分子被离子化并加速以返回到真空泵。

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