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    Ion pump and charged particle beam device using the same
    3.
    发明授权
    Ion pump and charged particle beam device using the same 有权

    公开(公告)号：US09837243B2

    公开(公告)日：2017-12-05

    申请号：US15015930

    申请日：2016-02-04

    Applicant: HITACHI, LTD.

    Inventor： Keigo Kasuya ,  Takeshi Kawasaki ,  Takashi Ohshima ,  Souichi Katagiri

    IPC: H01J41/20 ,  H01J37/18

    CPC classification number: H01J37/18 ,  H01J41/20 ,  H01J2237/1825

    Abstract: An ion pump and a charged particle beam device each includes two opposite flat-plate cathodes, an anode with a cylindrical shape having openings that face the respective flat-plate cathodes, a voltage application unit configured to apply a potential higher than potentials of the flat-plate cathodes to the anode, a magnetic field application unit configured to apply a magnetic field along an axial direction of the cylindrical shape of the anode, and a cathode bar arranged within the anode. The surface of the cathode bar is formed with a material that forms a non-evaporative getter alloy film on the anode or the flat-plate cathodes.

    VACUUM PUMPING SYSTEM WITH A PLURALITY OF SPUTTER ION PUMPS
    4.
    发明申请
    VACUUM PUMPING SYSTEM WITH A PLURALITY OF SPUTTER ION PUMPS 审中-公开
    真空泵系统具有大量的飞溅离子泵

    公开(公告)号：US20100034668A1

    公开(公告)日：2010-02-11

    申请号：US12537159

    申请日：2009-08-06

    Applicant: Gianfranco Cappuzzo ,  Cristian Macarrone ,  Michele Mura

    Inventor： Gianfranco Cappuzzo ,  Cristian Macarrone ,  Michele Mura

    IPC: H01J41/20

    CPC classification number: H01J41/20

    Abstract: In a vacuum pumping system with a plurality of sputter ion pumps the considerable reduction in its overall axial size and weight is achieved by utilizing a plurality of axially superimposed sputter ion pumps and a common magnetic circuit, which comprises a pair of external magnets located at opposite axial ends of the pumping system, one or more intermediate magnets arranged alternated with the sputter ion pumps and a ferromagnetic yoke, internally enclosing the external magnets and the one or more intermediate magnets.

    Abstract translation: 在具有多个溅射离子泵的真空泵送系统中，通过利用多个轴向重叠的溅射离子泵和公共磁路来实现其总体轴向尺寸和重量的显着降低，其包括位于相对的一对外部磁体 泵送系统的轴向端部，与溅射离子泵和铁磁轭交替排列的一个或多个中间磁体，内部包围外部磁体和一个或多个中间磁体。

    Stand alone plasma vacuum pump
    5.
    发明授权
    Stand alone plasma vacuum pump 失效
    独立式等离子真空泵

    公开(公告)号：US06873113B2

    公开(公告)日：2005-03-29

    申请号：US10268970

    申请日：2002-10-11

    Applicant: Raphael A. Dandl ,  Bill H. Quon

    Inventor： Raphael A. Dandl ,  Bill H. Quon

    IPC: H01J41/20 ,  F04B37/02

    CPC classification number: H01J41/20

    Abstract: A stand-alone plasma vacuum pump for pumping gas from a low-pressure inlet to a high-pressure outlet, composed of: a housing enclosing one or more pumping regions located between the inlet and the outlet; a plurality of permanent magnet assemblies providing magnetic fields that extend in the pumping region between the inlet and the outlet, the magnetic field forming magnetic flux channels for guiding and confining plasmas; elements disposed for coupling microwave power into the flux channels to heat electrons, ionize gas, and accelerate plasma ions in a direction from the inlet to the outlet; elements disposed for creating an electric in the magnetic flux channels to accelerate ions in the flux channels toward the outlet by momentum transfer; and a differential conductance baffle proximate to the outlet for promoting flow of plasma ions and neutral atoms to the outlet.

    Abstract translation: 一种独立的等离子体真空泵，用于将气体从低压入口泵送到高压出口，所述等离子体真空泵由围绕位于入口和出口之间的一个或多个泵送区域的外壳组成; 多个永磁体组件，其提供在入口和出口之间的泵送区域中延伸的磁场，形成用于引导和限制等离子体的磁通通道的磁场; 用于将微波功率耦合到通量通道中以加热电子，离子化气体并在从入口到出口的方向加速等离子体离子的元件; 被设置用于在磁通量通道中产生电的元件，以通过动量传递将通量通道中的离子加速到出口; 以及靠近出口的差动电导挡板，用于促进等离子体离子和中性原子流到出口。

    Small electron gun
    6.
    发明申请
    Small electron gun 有权
    小电子枪

    公开(公告)号：US20050052103A1

    公开(公告)日：2005-03-10

    申请号：US10873358

    申请日：2004-06-23

    Applicant: Soichi Katagiri ,  Takashi Ohshima

    Inventor： Soichi Katagiri ,  Takashi Ohshima

    IPC: H01J37/18 ,  H01J7/16 ,  H01J7/18 ,  H01J37/07 ,  H01J37/073 ,  H01J41/20

    CPC classification number: H01J37/18 ,  H01J7/16 ,  H01J7/18 ,  H01J37/07 ,  H01J2237/022 ,  H01J2237/062 ,  H01J2237/06316 ,  H01J2237/1825 ,  H01J2237/188

    Abstract: To provide a small electron gun capable of keeping a high vacuum pressure used for an electron microscope and an electron-beam drawing apparatus. An electron gun constituted by a nonevaporative getter pump, a heater, a filament, and an electron-source positioning mechanism is provided with an opening for rough exhausting and its automatically opening/closing valve, and means for ionizing and decomposing an inert gas or a compound gas for the nonevaporative getter pump. It is possible to keep a high vacuum pressure of 10−10 Torr without requiring an ion pump by using a small electron gun having a height and a width of approximately 15 cm while emitting electrons from the electron gun.

    Abstract translation: 提供能够保持用于电子显微镜和电子束拉伸装置的高真空压力的小型电子枪。 由非蒸发式吸气泵，加热器，灯丝和电子源定位机构构成的电子枪设置有用于粗排气的开口及其自动打开/关闭阀，以及用于电离和分解惰性气体或 用于非蒸发吸气泵的复合气体。 通过使用电子枪发射电子的高度和宽度约为15cm的小型电子枪，可以保持10 -10乇的高真空压力，而不需要离子泵。

    Ion pump
    7.
    发明授权
    Ion pump 失效
    离子泵

    公开(公告)号：US4631002A

    公开(公告)日：1986-12-23

    申请号：US525468

    申请日：1983-08-22

    Applicant: Marco Pierini

    Inventor： Marco Pierini

    IPC: H01J41/20 ,  F04F11/00

    CPC classification number: H01J41/20

    Abstract: A sputter ion pump with a cathode having blades arranged radially adjacent the cylindrical hollow cells of the anode.This arrangement increases the probability of grazing collisions useful for the formation of fast inert gas molecules, particularly argon. This improves the pumping speed and the speed stability in time.

    Abstract translation: 具有阴极的溅射离子泵，其具有径向邻近阳极的圆柱形中空电池排列的叶片。 这种布置增加了用于形成快速惰性气体分子，特别是氩气的放牧碰撞的可能性。 这样可以及时提高泵送速度和速度稳定性。

    Ion pump for producing an ultrahigh degree of vacuum
    8.
    发明授权
    Ion pump for producing an ultrahigh degree of vacuum 失效
    用于产生超高真空度的离子泵

    公开(公告)号：US4389165A

    公开(公告)日：1983-06-21

    申请号：US190913

    申请日：1980-09-26

    Applicant: Shoichi Ono ,  Kuniyoshi Yokoo

    Inventor： Shoichi Ono ,  Kuniyoshi Yokoo

    IPC: H01J41/12 ,  H01J41/20 ,  F04B37/02

    CPC classification number: H01J41/20

    Abstract: An ion pump for producing an ultrahigh degree of vacuum comprising a space formed between a first perforated flat plate-shaped electrode and a second flat plate-shaped electrode and having a high frequency electric source connected between the first and second electrodes, said space being operative to induce multipactor effect between said first and second electrodes, and an ionization space adjacent to one of said first and second electrodes and formed between a first perforated getter electrode and a second getter electrode applied with a negative potential, said ionization space being operative to cause the moving electrons produced by the multipactor effect to collide with gas molecules and ionize the latter.

    Abstract translation: 一种用于产生超高真空度的离子泵，包括形成在第一穿孔平板状电极和第二平板状电极之间并且具有连接在第一和第二电极之间的高频电源的空间，所述空间是可操作的 以在所述第一和第二电极之间诱导多反应器效应，以及与所述第一和第二电极之一相邻的电离空间，并形成在施加有负电位的第一穿孔吸气剂电极和第二吸气剂电极之间，所述电离空间可操作地引起 由多反应器产生的运动电子效应与气体分子碰撞并使其离子化。

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