Invention Grant
- Patent Title: Non-ambipolar electric pressure plasma uniformity control
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Application No.: US15164312Application Date: 2016-05-25
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Publication No.: US10388528B2Publication Date: 2019-08-20
- Inventor: Lee Chen , Zhiying Chen , Jianping Zhao , Merritt Funk
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/263 ; H01L21/67

Abstract:
This disclosure relates to a plasma processing system for controlling plasma density near the edge or perimeter of a substrate that is being processed. The plasma processing system may include a plasma chamber that can receive and process the substrate using plasma for etching the substrate, doping the substrate, or depositing a film on the substrate. This disclosure relates to a plasma processing system that may be configured to enable non-ambipolar diffusion to counter ion loss to the chamber wall. The plasma processing system may include a ring cavity coupled to the plasma processing system that is in fluid communication with plasma generated in the plasma processing system. The ring cavity may be coupled to a power source to form plasma that may diffuse ions into the plasma processing system to minimize the impact of ion loss to the chamber wall.
Public/Granted literature
- US20160268136A1 NON-AMBIPOLAR ELECTRIC PRESSURE PLASMA UNIFORMITY CONTROL Public/Granted day:2016-09-15
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