Invention Grant
- Patent Title: X-ray device and manufacturing method of structure
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Application No.: US14935837Application Date: 2015-11-09
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Publication No.: US10393678B2Publication Date: 2019-08-27
- Inventor: Takashi Watanabe , Daniel Hilton , Sam Hawker
- Applicant: NIKON CORPORATION , NIKON METROLOGY NV
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner LLP
- Main IPC: G01N23/04
- IPC: G01N23/04 ; G01N23/046 ; G01N23/06 ; G01N23/083 ; G01N23/087 ; G01V5/00

Abstract:
Provided is a device capable of suppressing a drop in detection accuracy, and a manufacturing method of a structure. A detection device is a device that irradiates a subject with X-rays and detects the X-rays transmitting through the subject, and includes an X-ray source that emits X-rays, a table that holds the subject, a detector that detects at least a portion of the transmitted X-rays emitted from the X-ray source and transmitted through the subject, and a first guide device and a second guide device that guide movement of the table in a direction parallel to an optical axis of the X-ray source while supporting the table. In this detection device, a guide plane, which is parallel to the optical axis and is a plane to which the movement of the table is regulated, passes through the inside of a detection region of the transmitted X-rays of the detector.
Public/Granted literature
- US20160139064A1 X-RAY DEVICE AND MANUFACTURING METHOD OF STRUCTURE Public/Granted day:2016-05-19
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