公开(公告)号：US20220082697A1

公开(公告)日：2022-03-17

申请号：US17485113

申请日：2021-09-24

Applicant: NIKON METROLOGY NV ,  NIKON CORPORATION

Inventor： Anthony SLOTWINSKI ,  Ghassan CHAMSINE ,  Tom HEDGES ,  Paul LIGHTOWLER ,  Daniel Gene SMITH ,  Yasuhiro HIDAKA ,  Masanori ARAI

IPC: G01S17/89 ,  G01S7/481 ,  G02B27/14 ,  G02B26/08 ,  G02B27/10 ,  G02B5/04 ,  G02B27/28

Abstract: Laser radar include two part objective lenses that are used for imaging a target and directing probe beams to the target. Portions of tracer beams that degrade target images are attenuated with dichroic filters that block central portions of tracer beams. Local oscillator beams can be produced with a mixing lens that directs probe beams through a polarizing beam splitter to focus at or on a waveplate so that portions are reflected from the waveplate as local oscillator beams. An imaging system that is confocal with a probe beam is coupled to provide target measurements or to establish a focus of the probe beam.

公开(公告)号：US10020157B2

公开(公告)日：2018-07-10

申请号：US15717364

申请日：2017-09-27

Applicant: NIKON METROLOGY NV

Inventor： Roger Hadland

IPC: H01J35/10 ,  H01J35/02 ,  H01J29/48 ,  F16C33/76 ,  H02M1/32 ,  H05G1/12 ,  H02M7/10 ,  H01J35/04 ,  F16J15/16 ,  H01J35/16 ,  F16C35/04

CPC classification number: H01J35/025 ,  F16C33/768 ,  F16C35/042 ,  F16J15/16 ,  H01J29/48 ,  H01J35/04 ,  H01J35/06 ,  H01J35/101 ,  H01J35/106 ,  H01J35/108 ,  H01J35/116 ,  H01J35/16 ,  H01J37/065 ,  H01J2235/0236 ,  H01J2235/083 ,  H01J2235/086 ,  H01J2235/1046 ,  H01J2235/1204 ,  H01J2235/1262 ,  H01J2235/20 ,  H01J2237/2482 ,  H02M1/32 ,  H02M7/106 ,  H05G1/12

Abstract: Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerized tomography. In particular, the high-voltage generator includes a shield electrode electrically connected intermediate of a first voltage multiplier and a second voltage multiplier. The electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. The rotary vacuum seal includes a pumpable chamber at a position intermediate between high-pressure and low-pressure ends of a bore for a rotating shaft. The rotary target assembly is configured such that when a torque between a bearing housing and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target has a plurality of target plates supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x-ray gun is provided with a shield electrode maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.

公开(公告)号：US09953799B2

公开(公告)日：2018-04-24

申请号：US14668029

申请日：2015-03-25

Applicant: NIKON CORPORATION ,  NIKON METROLOGY NV

Inventor： Fumihiko Hakoda ,  Satoshi Takahashi ,  Jim Smith

IPC: H01J35/16 ,  G01N23/04 ,  H01J35/04 ,  B22D46/00 ,  G21K7/00 ,  H05G1/02 ,  G01N23/02 ,  H01J9/42

CPC classification number: H01J35/16 ,  B22D46/00 ,  G01N23/02 ,  G01N23/04 ,  G21K7/00 ,  H01J9/42 ,  H01J35/04 ,  H01J35/045 ,  H01J2235/163 ,  H05G1/02

Abstract: Provided is an X-ray apparatus including: a target configured to generate an X-ray by collision of electrons or transmission of electrons; a filament configured to release the electrons to the target; a housing that has the filament therein; and a first holding member configured to hold a portion of the target disposed on an outer side of the housing on the outer side of the housing.

公开(公告)号：US20180033581A1

公开(公告)日：2018-02-01

申请号：US15717393

申请日：2017-09-27

Applicant: NIKON METROLOGY NV

Inventor： Roger HADLAND

IPC: H01J35/02 ,  H01J29/48 ,  F16C35/04 ,  F16C33/76 ,  F16J15/16 ,  H05G1/12 ,  H02M7/10 ,  H01J35/10 ,  H01J35/04 ,  H01J35/16 ,  H02M1/32

CPC classification number: H01J35/025 ,  F16C33/768 ,  F16C35/042 ,  F16J15/16 ,  H01J29/48 ,  H01J35/04 ,  H01J35/06 ,  H01J35/101 ,  H01J35/106 ,  H01J35/108 ,  H01J35/16 ,  H01J37/065 ,  H01J2235/0236 ,  H01J2235/083 ,  H01J2235/086 ,  H01J2235/087 ,  H01J2235/1046 ,  H01J2235/1204 ,  H01J2235/1262 ,  H01J2235/20 ,  H01J2237/2482 ,  H02M1/32 ,  H02M7/106 ,  H05G1/12

Abstract: Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. In particular, the high-voltage generator includes a shield electrode electrically connected intermediate of a first voltage multiplier and a second voltage multiplier. The electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. The rotary vacuum seal includes a pumpable chamber at a position intermediate between high-pressure and low-pressure ends of a bore for a rotating shaft. The rotary target assembly is configured such that when a torque between a bearing housing and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target has a plurality of target plates supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x-ray gun is provided with a shield electrode maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.

公开(公告)号：US20230282437A1

公开(公告)日：2023-09-07

申请号：US18017301

申请日：2021-07-23

Applicant: NIKON METROLOGY NV

Inventor： Ian George HAIG

IPC: H01J35/18

CPC classification number: H01J35/18 ,  H01J2235/168 ,  H01J2235/18

Abstract: Provided is a target assembly for an x-ray apparatus comprising a target housing and an entrance path formed in an entrance part of the target housing for accepting an incident electron beam, as well as a target member for generating x-rays under electron beam illumination through the entrance path and an exit path formed in an exit part of the target housing for allowing generated x-rays to exit the target assembly, the exit path being covered by an x-ray transmissive window. In the assembly, the exit path comprises an exit bore formed in the exit part which is configured to limit the generation of x-rays by impact of scattered electrons, which have been reflected from the target member, onto an inside of the bore. Also provided is a target assembly, an x-ray apparatus, a structure measurement apparatus, a structure measurement method, and a method of modifying a target assembly.

公开(公告)号：US20220178687A1

公开(公告)日：2022-06-09

申请号：US17598406

申请日：2020-03-26

Applicant: NIKON METROLOGY NV

Inventor： Koen Delaere

IPC: G01B21/14 ,  G01B21/20

Abstract: Provided herein is a method for inspecting for a workpiece (100), the workpiece (100) comprising a slot (110) with a proximal end (P) and a distal end (D), the method comprising: receiving a dimensional model (210) of at least part of the workpiece comprising at least part of the slot (110) measured with a dimensional measurement device (300); determining a burnish region (220) of the slot (110) that is a continuous region having an essentially constant profile from the dimensional model (210); wherein the burnish region is determined by subdividing an inner mantle (214) into a plurality of slices (216) and generating and fitting a plane geometric shape (218a to 218e) to each of the respective slices (216a to 216e).

公开(公告)号：US10571410B2

公开(公告)日：2020-02-25

申请号：US16220632

申请日：2018-12-14

Applicant: NIKON METROLOGY NV

Inventor： Ben Price ,  Michael Beechey ,  James Smith

IPC: G01N23/02 ,  G01N23/20025 ,  G01N23/2204

Abstract: An equipment mount for an x-ray apparatus is disclosed. The mount includes a main shield element, a peripheral shield element and a secondary shield element arranged to permit a mounting element to pass through the main shield element in a shielded manner. A support apparatus for an x-ray apparatus is also disclosed. The support apparatus comprises a separable bearing for translating a support part between a first position and a second position and an elevator mechanism for translating the support part from the second position to a third position, thereby separating the bearing.

公开(公告)号：US10393678B2

公开(公告)日：2019-08-27

申请号：US14935837

申请日：2015-11-09

Applicant: NIKON CORPORATION ,  NIKON METROLOGY NV

Inventor： Takashi Watanabe ,  Daniel Hilton ,  Sam Hawker

IPC: G01N23/04 ,  G01N23/046 ,  G01N23/06 ,  G01N23/083 ,  G01N23/087 ,  G01V5/00

Abstract: Provided is a device capable of suppressing a drop in detection accuracy, and a manufacturing method of a structure. A detection device is a device that irradiates a subject with X-rays and detects the X-rays transmitting through the subject, and includes an X-ray source that emits X-rays, a table that holds the subject, a detector that detects at least a portion of the transmitted X-rays emitted from the X-ray source and transmitted through the subject, and a first guide device and a second guide device that guide movement of the table in a direction parallel to an optical axis of the X-ray source while supporting the table. In this detection device, a guide plane, which is parallel to the optical axis and is a plane to which the movement of the table is regulated, passes through the inside of a detection region of the transmitted X-rays of the detector.

公开(公告)号：US10166076B2

公开(公告)日：2019-01-01

申请号：US14775245

申请日：2014-03-27

Applicant: NIKON METROLOGY NV

Inventor： Andrew Timothy Ramsey ,  Andrew Robert Ray

IPC: A61B6/00 ,  A61B19/00 ,  A61B6/03 ,  G01N23/046 ,  G21K1/10 ,  A61B90/00 ,  G06T11/00

Abstract: Disclosed is a registration object for computed radiographic tomography. The object has a body portion defining a void for including at least part of a target object. The registration object comprises one or more relatively radiopaque or relatively radiolucent features. Said feature or features provide, in a suitable proportion of radiographic projections of the registration object with respect to angle about a predetermined axis, a pair of identifiable registration points which are spaced apart in a direction parallel to the predetermined axis by a first distance, and whose positions in that direction are each either a constant or a function only of the angle of the projection about the predetermined axis. Said feature or features define, in the suitable proportion of radiographic projections of the object with respect to angle about a predetermined axis, a pair of identifiable registration points which are spaced apart in a direction perpendicular to the predetermined axis by a second distance whose positions in that direction are each either a constant or a continuous function only of the angle of the projection about the predetermined axis. The suitable proportion can be substantially all or all radiographic projections. Also disclosed are a method, an apparatus, a storage medium and a signal for correcting computerized radiographic tomography data, optionally using such an object.

公开(公告)号：US10139492B2

公开(公告)日：2018-11-27

申请号：US15443967

申请日：2017-02-27

Applicant: Nikon Corporation ,  Nikon Metrology NV

Inventor： Mina A. Rezk ,  Anthony R. Slotwinski ,  Daniel G. Smith ,  Eric Peter Goodwin ,  Alexander Cooper ,  Thomas M. Hedges

IPC: G01S17/32 ,  G01S17/66 ,  G01S17/42 ,  G01S7/481 ,  G01S7/497 ,  G01S7/491 ,  G01B9/02

Abstract: Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.