Invention Grant
- Patent Title: Laser unit management system
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Application No.: US15914299Application Date: 2018-03-07
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Publication No.: US10394133B2Publication Date: 2019-08-27
- Inventor: Yuji Minegishi , Yutaka Igarashi , Takeshi Ohta
- Applicant: GIGAPHOTON INC.
- Applicant Address: JP Tochigi
- Assignee: GIGAPHOTON INC.
- Current Assignee: GIGAPHOTON INC.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03F7/20 ; G06F21/62 ; H01S3/08 ; H01S3/137 ; H01S3/225 ; H01S3/036

Abstract:
A laser unit management system may include a server configured to hold first information provided with access limitation that allows an access with a first access authorization, second information provided with access limitation that allows an access with a second access authorization, and third information provided with access limitation that allows both an access with the first access authorization and an access with the second access authorization; and a laser unit including a laser output section and a controller, the laser output section being configured to output pulsed laser light toward an exposure unit that is configured to perform wafer exposure, the controller being configured to store the first information, the second information, and the third information in the server. The second information may include wafer-exposure-related information on the exposure unit and laser-control-related information on the laser unit that are in association with each other.
Public/Granted literature
- US20180196347A1 LASER UNIT MANAGEMENT SYSTEM Public/Granted day:2018-07-12
Information query