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公开(公告)号：US10394133B2
公开(公告)日：2019-08-27
申请号：US15914299
申请日：2018-03-07
Applicant: GIGAPHOTON INC.
Inventor： Yuji Minegishi , Yutaka Igarashi , Takeshi Ohta
Abstract: A laser unit management system may include a server configured to hold first information provided with access limitation that allows an access with a first access authorization, second information provided with access limitation that allows an access with a second access authorization, and third information provided with access limitation that allows both an access with the first access authorization and an access with the second access authorization; and a laser unit including a laser output section and a controller, the laser output section being configured to output pulsed laser light toward an exposure unit that is configured to perform wafer exposure, the controller being configured to store the first information, the second information, and the third information in the server. The second information may include wafer-exposure-related information on the exposure unit and laser-control-related information on the laser unit that are in association with each other.
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公开(公告)号：US11822324B2
公开(公告)日：2023-11-21
申请号：US17366586
申请日：2021-07-02
Applicant: Gigaphoton Inc.
Inventor： Kunihiko Abe , Yuji Minegishi , Satoru Kikuchi , Osamu Wakabayashi
CPC classification number: G05B23/0283 , G06N3/02 , G06N20/00
Abstract: A machine learning method according to a viewpoint of the present disclosure is a machine learning method for creating a learning model configured to estimate the life of a consumable of a laser apparatus, the method including acquiring first life-related information containing data on a parameter relating to the life of the consumable, the data recorded in correspondence with different numbers of oscillation pulses during a period from the start of use of the consumable to replacement thereof, dividing the first life-related information into a plurality of levels each representing the degree of degradation of the consumable in accordance with the numbers of oscillation pulses to create training data, creating the learning model by performing machine learning using the created training data, and saving the created learning model.
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公开(公告)号：US11353857B2
公开(公告)日：2022-06-07
申请号：US16729990
申请日：2019-12-30
Applicant: Gigaphoton Inc.
Inventor： Yutaka Igarashi , Yuji Minegishi , Osamu Wakabayashi
IPC: G05B19/418 , G03F7/20
Abstract: A data analyzer includes a data collector that acquires data on each analysis target parameter of each of a plurality of apparatuses from the apparatus, the plurality of apparatuses including a light source apparatus, an exposure apparatus that exposes a wafer to pulsed light outputted from the light source apparatus, and a wafer inspection apparatus that inspects the exposed wafer, an image generator that visualizes the data on each of the parameters collected by the data collector from the apparatuses that process the wafer for each predetermined area of the wafer to convert the data into an image and generates a plurality of mapped images for each of the parameters of the apparatuses, and a correlation computing section that performs pattern matching on arbitrary ones of the mapped images generated from the wafer to determine a correlation value between arbitrary ones of the parameters of the apparatuses.
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公开(公告)号：US11353801B2
公开(公告)日：2022-06-07
申请号：US17134944
申请日：2020-12-28
Applicant: Gigaphoton Inc.
Inventor： Kunihiko Abe , Yuji Minegishi , Osamu Wakabayashi
Abstract: A maintenance management method for a lithography system according to a viewpoint of the present disclosure includes organizing and saving operating information for each of lithography cells that are each an apparatus group formed of a set of apparatuses and form the lithography system, organizing and saving maintenance information on consumables for each of the lithography cells, calculating a standard maintenance timing for each of the consumables for each of the lithography cells based on the operating information and the maintenance information on the consumable for each of the lithography cells, creating a maintenance schedule plan for each of the lithography cells or for each of manufacturing lines based on the standard maintenance timing, information on a downtime, and information on a loss cost due to the downtime for each of the lithography cells or for each of the manufacturing lines, and outputting the result of the creation of the maintenance schedule plan.
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