- 专利标题: Ion implantation method and ion implantation apparatus
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申请号: US15862335申请日: 2018-01-04
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公开(公告)号: US10395890B2公开(公告)日: 2019-08-27
- 发明人: Haruka Sasaki
- 申请人: SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO., LTD.
- 申请人地址: JP Tokyo
- 专利权人: SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO., LTD.
- 当前专利权人: SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO., LTD.
- 当前专利权人地址: JP Tokyo
- 代理机构: Michael Best & Friedrich LLP
- 优先权: JP2017-000903 20170106
- 主分类号: H01J37/317
- IPC分类号: H01J37/317 ; H05H15/00 ; H01J37/05 ; H05H7/00 ; H05H9/04
摘要:
An ion implantation apparatus includes: a multistage linear acceleration unit including a plurality of stages of high-frequency resonators and a plurality of stages of focusing lenses; a first beam measuring unit disposed in the middle of the multistage linear acceleration unit and configured to allow passage of a beam portion adjacent to a center of a beam trajectory and measure a current intensity of another beam portion blocked by an electrode body outside a vicinity of the center of the beam trajectory; a second beam measuring unit disposed downstream of the multistage linear acceleration unit and configured to measure a current intensity of an ion beam exiting from the multistage linear acceleration unit; and a control device configured to adjust a control parameter of the plurality of stages of focusing lenses based on measurement results of the first and second beam measuring units.
公开/授权文献
- US20180197716A1 ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS 公开/授权日:2018-07-12
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