Invention Grant
- Patent Title: Systems and methods for achieving peak ion energy enhancement with a low angular spread
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Application No.: US15693134Application Date: 2017-08-31
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Publication No.: US10395894B2Publication Date: 2019-08-27
- Inventor: Juline Shoeb , Ying Wu , Alex Paterson
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Penilla IP, APC
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/67 ; H01L21/683 ; H01L21/3065

Abstract:
Systems and methods for increasing peak ion energy with a low angular spread of ions are described. In one of the systems, multiple radio frequency (RF) generators that are coupled to an upper electrode associated with a plasma chamber are operated in two different states, such as two different frequency levels, for pulsing of the RF generators. The pulsing of the RF generators facilitates a transfer of ion energy during one of the states to another one of the states for increasing ion energy during the other state to further increase a rate of processing a substrate.
Public/Granted literature
- US20190066979A1 SYSTEMS AND METHODS FOR ACHIEVING PEAK ION ENERGY ENHANCEMENT WITH A LOW ANGULAR SPREAD Public/Granted day:2019-02-28
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