Invention Grant
- Patent Title: Chamber with vertical support stem for symmetric conductance and RF delivery
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Application No.: US16039229Application Date: 2018-07-18
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Publication No.: US10395902B2Publication Date: 2019-08-27
- Inventor: Daniel Arthur Brown , John Patrick Holland , Michael C. Kellogg , James E. Tappan , Jerrel K. Antolik , Ian Kenworthy , Theo Panagopoulos , Zhigang Chen
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Penilla IP, APC
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
A plasma chamber is provided to increase conductance within the plasma chamber and to increase uniformity of the conductance. A radio frequency (RF) path for supplying power to the plasma chamber is symmetric with respect to a center axis of the plasma chamber. Moreover, pumps used to remove materials from the plasma chamber are located symmetric with respect to the center axis. The symmetric arrangements of the RF paths and the pumps facilitate an increase in conductance uniformity within the plasma chamber.
Public/Granted literature
- US20180323044A1 CHAMBER WITH VERTICAL SUPPORT STEM FOR SYMMETRIC CONDUCTANCE AND RF DELIVERY Public/Granted day:2018-11-08
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