Invention Grant
- Patent Title: Semiconductor device
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Application No.: US16005022Application Date: 2018-06-11
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Publication No.: US10396029B2Publication Date: 2019-08-27
- Inventor: Koujirou Matsui , Takehiko Sakamoto , Kazuyuki Umezu , Tomoaki Uno
- Applicant: Renesas Electronics Corporation
- Applicant Address: JP Tokyo
- Assignee: RENESAS ELECTRONICS CORPORATION
- Current Assignee: RENESAS ELECTRONICS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Shapiro, Gabor and Rosenberger, PLLC
- Priority: JP2013-240286 20131120
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H03K17/687 ; H01L23/532 ; H01L27/088 ; H01L23/482 ; H01L29/40 ; H01L29/78 ; H01L29/06

Abstract:
A plurality of unit MISFET elements connected in parallel with each other to make up a power MISFET are formed in an LDMOSFET forming region on a main surface of a semiconductor substrate. A control circuit that controls a gate voltage of the power MISFET is formed in a driver circuit region on the main surface of the semiconductor substrate. A wiring structure having a plurality of wiring layers made of the same metal material is formed on the semiconductor substrate. The gate electrodes of the plurality of unit MISFET elements formed in the LDMOSFET forming region are electrically connected to each other via gate wirings formed in all of the plurality of wiring layers made of the same metal material.
Public/Granted literature
- US20180294220A1 SEMICONDUCTOR DEVICE Public/Granted day:2018-10-11
Information query
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