- 专利标题: Method for the fabrication of electron field emission devices including carbon nanotube electron field emission devices
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申请号: US15853485申请日: 2017-12-22
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公开(公告)号: US10403463B2公开(公告)日: 2019-09-03
- 发明人: Mehmet Ozgur , Paul Sunal , Lance Oh , Michael Huff , Michael Pedersen
- 申请人: CORPORATION FOR NATIONAL RESEARCH INITIATIVES
- 申请人地址: US VA Reston
- 专利权人: CORPORATION FOR NATIONAL RESEARCH INITIATIVES
- 当前专利权人: CORPORATION FOR NATIONAL RESEARCH INITIATIVES
- 当前专利权人地址: US VA Reston
- 代理机构: Nixon & Vanderhye P.C.
- 主分类号: H01J9/02
- IPC分类号: H01J9/02 ; B82Y10/00 ; B82Y40/00 ; H01J1/304
摘要:
The present invention is directed to a method for the fabrication of electron field emitter devices, including carbon nanotube (CNT) field emission devices. The method of the present invention involves depositing one or more electrically conductive thin-film layers onto a electrically conductive substrate and performing lithography and etching on these thin film layers to pattern them into the desired shapes. The top-most layer may be of a material type that acts as a catalyst for the growth of single- or multiple-walled carbon nanotubes (CNTs). Subsequently, the substrate is etched to form a high-aspect ratio post or pillar structure onto which the previously patterned thin film layers are positioned. Carbon nanotubes may be grown on the catalyst material layer. The present invention also described methods by which the individual field emission devices may be singulated into individual die from a substrate.