-
1.发明申请公开(公告)号：US20180197711A1
公开(公告)日：2018-07-12
申请号：US15853485
申请日：2017-12-22
Inventor： Mehmet Ozgur , Paul Sunal , Lance Oh , Michael Huff , Michael Pedersen
CPC classification number: H01J1/304 , B82Y10/00 , B82Y40/00 , H01J9/025 , H01J2201/30469
Abstract: The present invention is directed to a method for the fabrication of electron field emitter devices, including carbon nanotube (CNT) field emission devices. The method of the present invention involves depositing one or more electrically conductive thin-film layers onto a electrically conductive substrate and performing lithography and etching on these thin film layers to pattern them into the desired shapes. The top-most layer may be of a material type that acts as a catalyst for the growth of single- or multiple-walled carbon nanotubes (CNTs). Subsequently, the substrate is etched to form a high-aspect ratio post or pillar structure onto which the previously patterned thin film layers are positioned. Carbon nanotubes may be grown on the catalyst material layer. The present invention also described methods by which the individual field emission devices may be singulated into individual die from a substrate.
-
公开(公告)号：US10910185B2
公开(公告)日：2021-02-02
申请号：US16527533
申请日：2019-07-31
Inventor： Mehmet Ozgur , Paul Sunal , Lance Oh , Michael Huff , Michael Pedersen
Abstract: The present invention is directed to a method for the fabrication of electron field emitter devices, including carbon nanotube (CNT) field emission devices. The method of the present invention involves depositing one or more electrically conductive thin-film layers onto an electrically conductive substrate and performing lithography and etching on these thin film layers to pattern them into the desired shapes. The top-most layer may be of a material type that acts as a catalyst for the growth of single- or multiple-walled carbon nanotubes (CNTs). Subsequently, the substrate is etched to form a high-aspect ratio post or pillar structure onto which the previously patterned thin film layers are positioned. Carbon nanotubes may be grown on the catalyst material layer. The present invention also described methods by which the individual field emission devices may be singulated into individual die from a substrate.
-
公开(公告)号：US10403463B2
公开(公告)日：2019-09-03
申请号：US15853485
申请日：2017-12-22
Inventor： Mehmet Ozgur , Paul Sunal , Lance Oh , Michael Huff , Michael Pedersen
Abstract: The present invention is directed to a method for the fabrication of electron field emitter devices, including carbon nanotube (CNT) field emission devices. The method of the present invention involves depositing one or more electrically conductive thin-film layers onto a electrically conductive substrate and performing lithography and etching on these thin film layers to pattern them into the desired shapes. The top-most layer may be of a material type that acts as a catalyst for the growth of single- or multiple-walled carbon nanotubes (CNTs). Subsequently, the substrate is etched to form a high-aspect ratio post or pillar structure onto which the previously patterned thin film layers are positioned. Carbon nanotubes may be grown on the catalyst material layer. The present invention also described methods by which the individual field emission devices may be singulated into individual die from a substrate.
-
-
Search Results
3
records
(took 0.01 seconds)
