Invention Grant
- Patent Title: Digital photolithography using compact eye module layout
-
Application No.: US15412530Application Date: 2017-01-23
-
Publication No.: US10409172B2Publication Date: 2019-09-10
- Inventor: David Markle , Thomas Laidig , Timothy N. Thomas
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: G03B27/52
- IPC: G03B27/52 ; G03F7/20 ; F21V8/00 ; G02B7/04 ; G02B27/00 ; G02F1/13 ; G02B7/36 ; G02B5/04 ; G02B26/08

Abstract:
Embodiments of the present disclosure generally relate to apparatuses and systems for performing photolithography processes. More particularly, compact apparatuses for projecting an image onto a substrate are provided. In one embodiment, an image projection apparatus includes a light pipe coupled to a first mounting plate, and a frustrated prism assembly, one or more digital micro-mirror devices, one or more beamsplitters, and one or more projection optics, which are coupled to a second mounting plate. The first and second mounting plates are coplanar, such that the image projection apparatus is compact and may be aligned in a system having a plurality of image projection apparatuses, each of which is easily removable and replaceable.
Public/Granted literature
- US20170219934A1 COMPACT EYE MODULE LAYOUT Public/Granted day:2017-08-03
Information query