Invention Grant
- Patent Title: Imaging apparatus and imaging method
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Application No.: US16037088Application Date: 2018-07-17
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Publication No.: US10429315B2Publication Date: 2019-10-01
- Inventor: Akio Ishikawa , Ken Ozawa , Kwang-Soo Kim , Sean Park , Mitsunori Numata
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Agency: Muir Patent Law, PLLC
- Priority: JP2017-138724 20170718; KR10-2017-0135454 20171018
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G01N21/88 ; G02B27/42 ; G06T7/00 ; G01N21/956

Abstract:
An imaging apparatus includes an illumination light source to output an illumination light, an illumination optical system to transmit the illumination light toward a sample, an imaging optical system to transmit light reflected from the sample, a stage to move the sample in a predetermined transfer direction, and a photographing unit to receive the reflected light. The imaging apparatus may include one or more diffraction grids located at conjugate focal planes of the sample. The operation of the photographing unit may be synchronized with a movement of the sample by the stage to obtain an image in accordance with a time delay integration method.
Public/Granted literature
- US20190025226A1 IMAGING APPARATUS AND IMAGING METHOD Public/Granted day:2019-01-24
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