The device includes a spatial light modulation section having a phase modulation plane to which laser light L1 in a wavelength region longer than an ultraviolet region is input, and on which a phase of the laser light L1 is modulated at each of a plurality of two-dimensionally arrayed regions, to generate modulated laser light L2, a wavelength conversion section having a light incident plane which receives the modulated laser light L2 output from the spatial light modulation section, and converting a wavelength of the modulated laser light L2 into a wavelength in the ultraviolet region, and an image transfer optical system coupling the phase modulation plane of the spatial light modulation section and the light incident plane of the wavelength conversion section, so as to be optically conjugate systems to each other.