公开(公告)号：US10429720B2

公开(公告)日：2019-10-01

申请号：US14428854

申请日：2013-09-03

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Hiroshi Saito ,  Masatoshi Fujimoto ,  Shingo Oishi ,  Kenshi Fukumitsu

IPC: G02F1/37 ,  G02B5/30 ,  G02F1/1337 ,  G02F1/1362 ,  G02F1/29 ,  G03F7/20 ,  G02F1/1335 ,  G02F1/35

Abstract: The device includes a spatial light modulation section having a phase modulation plane to which laser light L1 in a wavelength region longer than an ultraviolet region is input, and on which a phase of the laser light L1 is modulated at each of a plurality of two-dimensionally arrayed regions, to generate modulated laser light L2, a wavelength conversion section having a light incident plane which receives the modulated laser light L2 output from the spatial light modulation section, and converting a wavelength of the modulated laser light L2 into a wavelength in the ultraviolet region, and an image transfer optical system coupling the phase modulation plane of the spatial light modulation section and the light incident plane of the wavelength conversion section, so as to be optically conjugate systems to each other.

公开(公告)号：US20150219980A1

公开(公告)日：2015-08-06

申请号：US14428854

申请日：2013-09-03

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Hiroshi Saito ,  Masatoshi Fujimoto ,  Shingo Oishi ,  Kenshi Fukumitsu

IPC: G02F1/37 ,  G02F1/1337

CPC classification number: G02F1/37 ,  G02B5/3091 ,  G02F1/133553 ,  G02F1/1337 ,  G02F1/136277 ,  G02F1/292 ,  G02F1/3534 ,  G02F2203/18 ,  G03F7/70291

Abstract: The device includes a spatial light modulation section having a phase modulation plane to which laser light L1 in a wavelength region longer than an ultraviolet region is input, and on which a phase of the laser light L1 is modulated at each of a plurality of two-dimensionally arrayed regions, to generate modulated laser light L2, a wavelength conversion section having a light incident plane which receives the modulated laser light L2 output from the spatial light modulation section, and converting a wavelength of the modulated laser light L2 into a wavelength in the ultraviolet region, and an image transfer optical system coupling the phase modulation plane of the spatial light modulation section and the light incident plane of the wavelength conversion section, so as to be optically conjugate systems to each other.

Abstract translation: 该装置包括：空间光调制部，具有输入比紫外线区域长的波长区域中的激光L1的相位调制面，激光L1的相位在多个二极管中的每一个被调制， 生成调制激光L2，具有光入射面的波长转换部，其接收从空间光调制部输出的调制激光L2，并将调制后的激光L2的波长转换为 以及将空间光调制部的相位调制面和波长转换部的光入射面耦合的图像传输光学系统，以便是彼此的光学共轭系统。