Invention Grant
- Patent Title: Wafer carrier with independent isolated heater zones
-
Application No.: US14614199Application Date: 2015-02-04
-
Publication No.: US10431435B2Publication Date: 2019-10-01
- Inventor: Dmitry Lubomirsky , Son T. Nguyen , Anh N. Nguyen , David Palagashvill
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/67 ; H01L21/687
Abstract:
A wafer carrier is described with independent isolated heater zones. In one example, the carrier has a puck to carry a workpiece for fabrication processes, a heater plate having a plurality of thermally isolated blocks each thermally coupled to the puck, and each having a heater to heat a respective block of the heater plate, and a cooling plate fastened to and thermally coupled to the heater plate, the cooling plate having a cooling channel to carry a heat transfer fluid to transfer heat from the cooling plate.
Public/Granted literature
- US20160035544A1 WAFER CARRIER WITH INDEPENDENT ISOLATED HEATER ZONES Public/Granted day:2016-02-04
Information query
