Invention Grant
- Patent Title: Insulating gate separation structure
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Application No.: US16134650Application Date: 2018-09-18
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Publication No.: US10431499B2Publication Date: 2019-10-01
- Inventor: Guowei Xu , Hui Zang , Haiting Wang , Yue Zhong
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L21/8234 ; H01L27/02 ; H01L27/088 ; H01L21/311 ; H01L29/66 ; H01L21/3213 ; H01L21/3105 ; H01L21/02 ; H01L21/027

Abstract:
One illustrative integrated circuit product disclosed herein includes a first final gate structure for a first transistor device, a second final gate structure for a second transistor device, the first and second transistors having a gate width direction and a gate length direction that is substantially normal to the gate width direction, and an insulating gate separation structure positioned between the first and second final gate structures, the insulating gate separation structure comprising an upper portion and a lower portion, the lower portion having a first lateral width in the gate width direction that is substantially uniform throughout a vertical height of the lower portion, the upper portion having a substantially uniform second lateral width in the gate width direction that is substantially uniform throughout a vertical height of the upper portion, wherein the second lateral width is less than the first lateral width.
Public/Granted literature
- US20190244865A1 INSULATING GATE SEPARATION STRUCTURE Public/Granted day:2019-08-08
Information query
IPC分类: