A substrate treating apparatus comprises: an alignment unit for aligning a substrate placed in a support unit in position; and a teaching unit for setting a transfer position for transferring the substrate onto the support unit of the transfer unit, wherein the teaching unit correcting a transfer position of the transfer unit based on a difference value between a first position of a substrate placed on a hand of the transfer unit when the transfer unit is transferring the substrate and a second position of a substrate placed on the hand of the transfer unit that picks up the substrate aligned to the support unit in position.