Invention Grant
- Patent Title: Approach to minimization of strain loss in strained fin field effect transistors
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Application No.: US15790826Application Date: 2017-10-23
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Publication No.: US10446647B2Publication Date: 2019-10-15
- Inventor: Zhenxing Bi , Kangguo Cheng , Juntao Li , Peng Xu
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/10 ; H01L29/78 ; H01L29/417 ; H01L29/06 ; H01L21/3065 ; H01L29/165 ; H01L29/49

Abstract:
A method of fabricating a vertical fin field effect transistor with a strained channel, including, forming a strained vertical fin on a substrate, forming a plurality of gate structures on the strained vertical fin, forming an interlevel dielectric on the strained vertical fin, forming a source/drain contact on the vertical fin adjacent to each of the plurality of gate structures, and selectively removing one or more of the source/drain contacts to form a trench adjacent to a gate structure.
Public/Granted literature
- US20180108771A1 APPROACH TO MINIMIZATION OF STRAIN LOSS IN STRAINED FIN FIELD EFFECT TRANSISTORS Public/Granted day:2018-04-19
Information query
IPC分类: