Invention Grant
- Patent Title: Negative capacitance integration through a gate contact
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Application No.: US15783270Application Date: 2017-10-13
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Publication No.: US10446659B2Publication Date: 2019-10-15
- Inventor: Steven Bentley , Rohit Galatage , Puneet Harischandra Suvarna
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent David Cain
- Main IPC: H01L29/51
- IPC: H01L29/51 ; H01L29/49 ; H01L21/28 ; H01L23/535 ; H01L29/66 ; H01L29/78 ; H01L21/768

Abstract:
A layer of ferroelectric material is incorporated into the gate contact of a metal oxide semiconductor field effect transistor (MOSFET), i.e., outside of the device active area. Flexibility in the deposition and patterning of the ferroelectric layer geometry allows for efficient matching between the capacitance of the ferroelectric layer and the capacitance of the gate, providing a step-up voltage transformer, decreased threshold voltage, and a sub-threshold swing for the device of less than 60 mV/decade.
Public/Granted literature
- US20190115444A1 NEGATIVE CAPACITANCE INTEGRATION THROUGH A GATE CONTACT Public/Granted day:2019-04-18
Information query
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