• Patent Title: Integrated optical sensor and method of producing an integrated optical sensor
  • Application No.: US15533989
    Application Date: 2015-12-04
  • Publication No.: US10453972B2
    Publication Date: 2019-10-22
  • Inventor: Hubert Enichlmair
  • Applicant: ams AG
  • Applicant Address: AT Unterpremstaetten
  • Assignee: ams AG
  • Current Assignee: ams AG
  • Current Assignee Address: AT Unterpremstaetten
  • Agency: Fish & Richardson P.C.
  • Priority: EP14196808 20141208
  • International Application: PCT/EP2015/078704 WO 20151204
  • International Announcement: WO2016/091757 WO 20160616
  • Main IPC: H01L31/0232
  • IPC: H01L31/0232 H01L31/0216 H01L27/146 H01L27/144 H01L31/02
Integrated optical sensor and method of producing an integrated optical sensor
Abstract:
An integrated optical sensor comprises a semiconductor substrate (1), an integrated circuit (2), a dielectric layer (6), a wiring (4), a structured filter layer (7) and a diffuser (10). The semiconductor substrate (1) has a main surface (11) and the integrated circuit (2) is arranged in the substrate (1) at or near the main surface (11). Furthermore, the integrated circuit (2) comprises at least one light sensitive component (3). The dielectric layer (6) comprises at least one compound of the semiconductor material. The dielectric layer (6) is arranged on or above the main surface (11). The wiring (4) is arranged in the dielectric layer (6) and provides an electrical connection to the integrated circuit (2), i.e. the wiring is connected to the integrated circuit (2). The structured filter layer (7) is arranged on the dielectric layer (6) and faces the at least one light sensitive component (3), i.e. the diffusor (10) is positioned over the structured filter layer (7). In particular, the structured filter layer (7) is adapted for diffused incident light. The diffuser (10) is arranged on the structured filter layer (7).
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