Invention Grant
- Patent Title: Apparatus and methods to create a buffer which extends into a gated region of a transistor
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Application No.: US15575322Application Date: 2015-05-27
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Publication No.: US10461193B2Publication Date: 2019-10-29
- Inventor: Chandra S. Mohapatra , Gilbert Dewey , Anand S. Murthy , Glenn A. Glass , Willy Rachmady , Jack T. Kavalieros , Tahir Ghani , Matthew V. Metz
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Green, Howard & Mughal LLP
- International Application: PCT/US2015/032612 WO 20150527
- International Announcement: WO2016/190858 WO 20161201
- Main IPC: H01L29/00
- IPC: H01L29/00 ; H01L29/786 ; H01L29/06 ; H01L29/423 ; H01L29/66 ; H01L29/78 ; H01L29/10

Abstract:
Transistor devices may be formed having a buffer between an active channel and a substrate, wherein the active channel and a portion of the buffer form a gated region. The active channel may comprise a low band-gap material on a sub-structure, e.g. the buffer, between the active channel and the substrate. The sub-structure may comprise a high band-gap material having a desired conduction band offset, such that leakage may be arrested without significant impact on electron mobility within the active channel. In an embodiment, the active channel and the sub-structure may be formed in a narrow trench, such that defects due to lattice mismatch between the active channel and the sub-structure are terminated in the sub-structure.
Public/Granted literature
- US20180158958A1 APPARATUS AND METHODS TO CREATE A BUFFER WHICH EXTENDS INTO A GATED REGION OF A TRANSISTOR Public/Granted day:2018-06-07
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