Invention Grant
- Patent Title: Nanochannel device with three dimensional gradient by single step etching for molecular detection
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Application No.: US15096933Application Date: 2016-04-12
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Publication No.: US10464061B2Publication Date: 2019-11-05
- Inventor: Jingwei Bai , Qinghuang Lin , Gustavo A. Stolovitzky , Chao Wang , Deqiang Wang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORTAION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORTAION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Main IPC: B81C1/00
- IPC: B81C1/00 ; B01L3/00 ; C12Q1/6869 ; G01N33/487 ; C12Q1/6874 ; B82Y40/00

Abstract:
A technique includes forming a gradient channel with width and depth gradients. A mask is disposed on top of a substrate. The mask is patterned with at least one elongated channel pattern having different elongated channel pattern widths. A channel is etched in the substrate in a single etching step, the channel having a width gradient and a corresponding depth gradient both simultaneously etched in the single etching step according to the different elongated channel pattern widths in the mask.
Public/Granted literature
- US20160220996A1 NANOCHANNEL DEVICE WITH THREE DIMENSIONAL GRADIENT BY SINGLE STEP ETCHING FOR MOLECULAR DETECTION Public/Granted day:2016-08-04
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