Invention Grant
- Patent Title: Adhesive for processing a microelectronic substrate, and related methods
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Application No.: US15799264Application Date: 2017-10-31
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Publication No.: US10465099B1Publication Date: 2019-11-05
- Inventor: Zubair Ahmed Khan , Dat Quach , Andrew Habermas , Joel William Hoehn
- Applicant: Seagate Technology LLC
- Applicant Address: US CA Cupertino
- Assignee: SEAGATE TECHNOLOGY LLC
- Current Assignee: SEAGATE TECHNOLOGY LLC
- Current Assignee Address: US CA Cupertino
- Agency: Kagan Binder, PLLC
- Main IPC: C09J175/04
- IPC: C09J175/04 ; C09J7/02 ; C09J133/10 ; H01L21/683 ; H01L21/304

Abstract:
Described are methods for processing microelectronic device substrates by a lapping step, e.g., a final lapping step, wherein the step includes the use of an elastomeric pressure-sensitive adhesive to secure the microelectronic device substrate to a carrier that holds the substrate to a surface of the carrier during the lapping step, and wherein the pressure-sensitive adhesive can be a non-polysilicone based adhesive having mechanical properties that include a tan delta that is below about 0.2.
Information query
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