发明授权
- 专利标题： Connection structure, magnetic annealing device using same, and connecting method
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申请号： US15001391申请日： 2016-01-20
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公开(公告)号： US10473399B2公开(公告)日： 2019-11-12
- 发明人: Ian Colgan , George Eyres , Ioan Domsa , Junichi Sato , Koyu Hasegawa , Tomoaki Abe
- 申请人： Tokyo Electron Limited
- 申请人地址： JP Tokyo
- 专利权人： Tokyo Electron Limited
- 当前专利权人： Tokyo Electron Limited
- 当前专利权人地址： JP Tokyo
- 代理机构： Abelman, Frayne & Schwab
- 优先权： JP2015-011743 20150123
- 主分类号： F27D3/00
- IPC分类号： F27D3/00 ; B23P19/00 ; H01L21/67 ; H01L21/677 ; F27B3/02 ; C21D9/00
摘要：
Disclosed is a connection structure that connects a housing to a magnetic annealing furnace that is provided with a fixedly arranged magnet and includes a first drum flange having a cylindrical flange portion. The connection structure includes: a second drum flange that is attached and fixed to the housing and includes a flange portion configured to externally or internally fit the flange portion of the first drum flange thereto; a first sealant that is installed between facing surfaces of the housing and the second drum flange; and a second sealant that is installed between facing surfaces of the first and second drum flanges.
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