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    MAGNETIC ANNEALING APPARATUS
    2.
    发明申请
    MAGNETIC ANNEALING APPARATUS 审中-公开
    磁性退火装置

    公开(公告)号：US20160061526A1

    公开(公告)日：2016-03-03

    申请号：US14840486

    申请日：2015-08-31

    申请人： Tokyo Electron Limited

    发明人： Mitsuru Yamazaki ,  Barry Clarke ,  Ian Colgan ,  George Eyres ,  Ioan Domsa

    IPC分类号： F27B17/00 ,  H01L43/12 ,  F27D7/06 ,  F27D99/00 ,  F27D5/00

    CPC分类号： F27B17/0025 ,  F27B5/08 ,  F27B17/005 ,  F27D5/0037 ,  F27D99/0001 ,  H01L21/67115 ,  H01L21/67313 ,  H01L21/67754 ,  H01L43/12

    摘要： Disclosed is a magnetic annealing apparatus including a processing container having a horizontally-elongated tubular shape and configured to perform a magnetic annealing processing on a plurality of substrates accommodated therein in a magnetic field; a heating unit provided to cover at least a part of a surface of the processing container that extends in a longitudinal direction, from outside; a magnet provided to cover the heating unit from the outside of the heating unit; a substrate holder configured to hold the plurality of substrates within the processing container; and a heat shielding plate provided to surround a part of the substrate holder.

    摘要翻译： 公开了一种磁性退火装置，其包括具有水平细长管状形状的处理容器，并且被配置为在磁场中容纳在其中的多个基板上进行磁退火处理; 加热单元，其设置成覆盖从外部沿长度方向延伸的处理容器的表面的至少一部分; 设置成从加热单元的外部覆盖加热单元的磁体; 衬底保持器，其构造成将所述多个衬底保持在所述处理容器内; 以及设置成围绕基板保持器的一部分设置的热屏蔽板。

    CONNECTION STRUCTURE, MAGNETIC ANNEALING DEVICE USING SAME, AND CONNECTING METHOD
    4.
    发明申请
    CONNECTION STRUCTURE, MAGNETIC ANNEALING DEVICE USING SAME, AND CONNECTING METHOD 审中-公开
    连接结构，使用相同的磁性退火装置和连接方法

    公开(公告)号：US20160216032A1

    公开(公告)日：2016-07-28

    申请号：US15001391

    申请日：2016-01-20

    申请人： Tokyo Electron Limited

    发明人： Ian Colgan ,  George Eyres ,  Ioan Domsa ,  Junichi Sato ,  Koyu Hasegawa ,  Tomoaki Abe

    IPC分类号： F27D3/00 ,  B23P19/00 ,  H01L21/67

    CPC分类号： F27D3/0084 ,  C21D9/0006 ,  F27B3/02 ,  H01L21/67109 ,  H01L21/67126 ,  H01L21/67754

    摘要： Disclosed is a connection structure that connects a housing to a magnetic annealing furnace that is provided with a fixedly arranged magnet and includes a first drum flange having a cylindrical flange portion. The connection structure includes: a second drum flange that is attached and fixed to the housing and includes a flange portion configured to externally or internally fit the flange portion of the first drum flange thereto; a first sealant that is installed between facing surfaces of the housing and the second drum flange; and a second sealant that is installed between facing surfaces of the first and second drum flanges.

    摘要翻译： 公开了一种连接结构，其将壳体连接到设置有固定布置的磁体的磁性退火炉，并且包括具有圆柱形凸缘部分的第一鼓凸缘。 连接结构包括：第二鼓法兰，其附接并固定到壳体并且包括凸缘部分，该凸缘部分构造成将第一鼓凸缘的凸缘部分外部或内部配合; 第一密封剂，其安装在所述壳体的相对表面和所述第二鼓凸缘之间; 以及第二密封剂，其被安装在所述第一和第二鼓凸缘的相对表面之间。

    HIGH CAPACITY MAGNETIC ANNEALING SYSTEM AND METHOD OF OPERATING
    7.
    发明申请
    HIGH CAPACITY MAGNETIC ANNEALING SYSTEM AND METHOD OF OPERATING 有权
    高容量磁性退火系统及其操作方法

    公开(公告)号：US20160069613A1

    公开(公告)日：2016-03-10

    申请号：US14752235

    申请日：2015-06-26

    申请人： Tokyo Electron Limited

    发明人： Ian Colgan ,  Ioan Domsa ,  George Eyres ,  Toru Ishii

    IPC分类号： F27B1/10 ,  H01L21/687 ,  H01L21/677 ,  H01L21/67 ,  H01L21/673

    CPC分类号： F27B1/10 ,  F27B17/0025 ,  F27D2003/0086 ,  H01L21/67103 ,  H01L21/67109 ,  H01L21/67115 ,  H01L21/67248 ,  H01L21/67303 ,  H01L21/67751 ,  H01L21/67757 ,  H01L21/68707 ,  H01L2221/683

    摘要： An annealing system and method of operating is described. The annealing system includes a vertical furnace having an inner cylindrical insulating tube and at least one heating element surrounding an outer surface thereof, wherein the inner cylindrical insulating tube defines a processing space into which a plurality of workpieces may be vertically translated and subjected to thermal and/or magnetic processing. The annealing system further includes a workpiece boat for carrying at least one hundred workpieces, a boat loader arranged beneath the vertical furnace, and configured to vertically translate the workpiece boat and position the workpieces within the processing space, and a magnet system arranged outside the vertical furnace and configured to generate a magnetic field within the processing space.

    摘要翻译： 描述退火系统和操作方法。 退火系统包括具有内圆柱形绝缘管和围绕其外表面的至少一个加热元件的立式炉，其中内圆柱形绝缘管限定了一个处理空间，多个工件可以垂直平移并经受热和 /或磁性加工。 退火系统还包括用于承载至少一百个工件的工件舟皿，布置在垂直炉下方的船载装置，并且构造成垂直平移工件舟皿并将工件定位在处理空间内;以及磁体系统， 并且被配置为在处理空间内产生磁场。

    Horizontal substrate boat
    8.
    发明授权
    Horizontal substrate boat 有权

    公开(公告)号：US11521876B2

    公开(公告)日：2022-12-06

    申请号：US16293471

    申请日：2019-03-05

    申请人： Tokyo Electron Limited

    发明人： Ioan Domsa ,  Ian Colgan ,  Makoto Saito ,  Mitsuru Yamazaki ,  George Eyres

    IPC分类号： H01L21/67 ,  H01L21/673

    摘要： A horizontal substrate carrier is provided, for example a carrier for holding semiconductor substrates during horizontal thermal processing. The horizontal substrate carrier has asymmetrically placed support rails. One side of the horizontal substrate carrier has no upper rail while the other side of the horizontal substrate carrier has an upper rail placed at a relatively high location, for example at an angular location of 60° or more, more preferably of 70° or more, and most preferably at 90°. The side without an upper rail may be used for robotic loading of the horizontal substrate carrier. In a preferred embodiment, only three rails are provided: one upper rail on one side and two lower rails. The use and placement of these three rails can hold the substrate in precise uniform locations, minimize substrate movement, and minimize particle generation, all while allowing for easy robotic access.

    High capacity magnetic annealing system and method of operating
    10.
    发明授权
    High capacity magnetic annealing system and method of operating 有权
    高容量磁退火系统及其操作方法

    公开(公告)号：US09410742B2

    公开(公告)日：2016-08-09

    申请号：US14752235

    申请日：2015-06-26

    申请人： Tokyo Electron Limited

    发明人： Ian Colgan ,  Ioan Domsa ,  George Eyres ,  Toru Ishii

    IPC分类号： H01L21/67 ,  H01L27/22 ,  F27B1/10 ,  H01L21/673 ,  H01L21/677 ,  H01L21/687

    CPC分类号： F27B1/10 ,  F27B17/0025 ,  F27D2003/0086 ,  H01L21/67103 ,  H01L21/67109 ,  H01L21/67115 ,  H01L21/67248 ,  H01L21/67303 ,  H01L21/67751 ,  H01L21/67757 ,  H01L21/68707 ,  H01L2221/683

    摘要： An annealing system and method of operating is described. The annealing system includes a vertical furnace having an inner cylindrical insulating tube and at least one heating element surrounding an outer surface thereof, wherein the inner cylindrical insulating tube defines a processing space into which a plurality of workpieces may be vertically translated and subjected to thermal and/or magnetic processing. The annealing system further includes a workpiece boat for carrying at least one hundred workpieces, a boat loader arranged beneath the vertical furnace, and configured to vertically translate the workpiece boat and position the workpieces within the processing space, and a magnet system arranged outside the vertical furnace and configured to generate a magnetic field within the processing space.

    摘要翻译： 描述退火系统和操作方法。 退火系统包括具有内圆柱形绝缘管和围绕其外表面的至少一个加热元件的立式炉，其中内圆柱形绝缘管限定了一个处理空间，多个工件可以垂直平移并经受热和 /或磁性加工。 退火系统还包括用于承载至少一百个工件的工件舟皿，布置在垂直炉下方的船载装置，并且构造成垂直平移工件舟皿并将工件定位在处理空间内;以及磁体系统， 并且被配置为在处理空间内产生磁场。