- Patent Title: Trench gate lead-out structure and manufacturing method therefor
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Application No.: US16064522Application Date: 2017-05-26
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Publication No.: US10475893B2Publication Date: 2019-11-12
- Inventor: Zheng Bian
- Applicant: CSMC TECHNOLOGIES FAB2 CO., LTD.
- Applicant Address: CN Jiangsu
- Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
- Current Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
- Current Assignee Address: CN Jiangsu
- Agency: Polsinelli PC
- Priority: CN201610378876 20160531
- International Application: PCT/CN2017/086136 WO 20170526
- International Announcement: WO2017/206812 WO 20171207
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L29/06 ; H01L29/66 ; H01L29/78

Abstract:
A trench gate lead-out structure comprises a substrate (10), a trench formed in the surface of the substrate (10) and a first dielectric layer (22) on the substrate (10), and also comprises a polysilicon gate (31) at the inner surface of the trench. The trench is partially filled by the polysilicon gate (31), so that a recess exists in the trench above the polysilicon gate (31). A second dielectric layer (41) is filled in the recess. The trench gate lead-out structure also comprises a metal plug (50). The metal plug (50) downwards penetrates through the first dielectric layer (22) and then is inserted between the second dielectric layer (41) and the polysilicon gate (31), and accordingly is connected to the polysilicon gate (31).
Public/Granted literature
- US20190027564A1 TRENCH GATE LEAD-OUT STRUCTURE AND MANUFACTURING METHOD THEREFOR Public/Granted day:2019-01-24
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