Invention Grant
- Patent Title: Removing polysilicon
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Application No.: US16018437Application Date: 2018-06-26
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Publication No.: US10479938B2Publication Date: 2019-11-19
- Inventor: Jerome A. Imonigie , Prashant Raghu
- Applicant: MICRON TECHNOLOGY, INC.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Dicke, Billig & Czaja, PLLC
- Main IPC: C09K13/08
- IPC: C09K13/08 ; H01L21/311 ; C09K13/00 ; C09K13/04 ; C09K13/06 ; H01L21/28 ; H01L27/11556 ; H01L21/3213 ; H01L21/306
Abstract:
Methods include exposing polysilicon to an aqueous composition comprising nitric acid, poly-carboxylic acid and ammonium fluoride, and removing a portion of the polysilicon selective to an oxide using the aqueous composition.
Public/Granted literature
- US20180298282A1 REMOVING POLYSILICON Public/Granted day:2018-10-18
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