Graphene spectral purity filter

Invention Grant

US10481510B2 Graphene spectral purity filter 有权

Patent Title: Graphene spectral purity filter
Application No.: US15974661

Application Date: 2018-05-08
Publication No.: US10481510B2

Publication Date: 2019-11-19
Inventor: Andrei Mikhailovich Yakunin , Vadim Yevgenyevich Banine , Erik Roelof Loopstra , Harmen Klaas Van Der Schoot , Lucas Henricus Johannes Stevens , Maarten Van Kampen
Applicant: ASML NETHERLANDS B.V.
Applicant Address: NL Veldhoven
Assignee: ASML Netherlands B.V.
Current Assignee: ASML Netherlands B.V.
Current Assignee Address: NL Veldhoven
Agency: Pillsbury Winthrop Shaw Pittman LLP
Main IPC: G02B5/20
IPC: G02B5/20 ; G03F7/20 ; B82Y10/00 ; B82Y40/00 ; G02B5/08 ; G02B27/00 ; G03F1/24 ; G03F1/62 ; G21K1/06 ; H01B1/04 ; H01B1/24 ; G03B27/54 ; G03F1/64 ; C01B32/20

Abstract:

A pellicle that includes graphene is constructed and arranged for an EUV reticle. A multilayer mirror includes graphene as an outermost layer.

Public/Granted literature

Information query

Espacenet

IPC分类: