Invention Grant
- Patent Title: Method and system for aligning probe card in semiconductor device testing
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Application No.: US15355446Application Date: 2016-11-18
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Publication No.: US10509071B2Publication Date: 2019-12-17
- Inventor: Kai-Di Chuang , Tien-Chung Lee , Chiu-Hua Chung , Kang-Tai Peng
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: G01R31/28
- IPC: G01R31/28 ; G01R1/073

Abstract:
A method for probe card alignment is provided. The method includes providing a probe card with a plurality of probe needles having their distal ends on a reference plane. The method further includes providing a light from both the upper side and lower side of the reference plane. The method also includes using a camera to image the probe needles. In addition, the method includes performing a probe card alignment process according to the image generated by the camera.
Public/Granted literature
- US20180143244A1 METHOD AND SYSTEM FOR ALIGNING PROBE CARD IN SEMICONDUCTOR DEVICE TESTING Public/Granted day:2018-05-24
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