公开(公告)号：US10509071B2

公开(公告)日：2019-12-17

申请号：US15355446

申请日：2016-11-18

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Kai-Di Chuang ,  Tien-Chung Lee ,  Chiu-Hua Chung ,  Kang-Tai Peng

IPC: G01R31/28 ,  G01R1/073

Abstract: A method for probe card alignment is provided. The method includes providing a probe card with a plurality of probe needles having their distal ends on a reference plane. The method further includes providing a light from both the upper side and lower side of the reference plane. The method also includes using a camera to image the probe needles. In addition, the method includes performing a probe card alignment process according to the image generated by the camera.