Invention Grant
- Patent Title: Photoacid generator
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Application No.: US16377714Application Date: 2019-04-08
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Publication No.: US10509315B2Publication Date: 2019-12-17
- Inventor: William Williams, III , Emad Aqad , James F. Cameron
- Applicant: Rohm and Haas Electronic Materials LLC
- Applicant Address: US MA Marlborough
- Assignee: ROHM AND HAAS ELECTRONIC MATERIALS, LLC
- Current Assignee: ROHM AND HAAS ELECTRONIC MATERIALS, LLC
- Current Assignee Address: US MA Marlborough
- Agency: Cantor Colburn LLP
- Main IPC: G03F7/004
- IPC: G03F7/004 ; C07C255/31 ; C07C25/18 ; C07C381/12 ; C07C255/24 ; C07C255/34 ; G03F7/039
Abstract:
A photoacid generator compound having Formula (I): wherein, EWG, Y, R, and M+ are the same as described in the specification.
Public/Granted literature
- US20190243239A1 PHOTOACID GENERATOR Public/Granted day:2019-08-08
Information query
IPC分类:
