Invention Grant
- Patent Title: Plating bath composition and method for electroless plating of palladium
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Application No.: US15778242Application Date: 2016-11-28
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Publication No.: US10513780B2Publication Date: 2019-12-24
- Inventor: Andreas Walter , Christof Suchentrunk , Thomas Beck , Gerhard Steinberger , Holger Bera , Heiko Brunner , Bernd Froese
- Applicant: Atotech Deutschland GmbH
- Applicant Address: DE Berlin
- Assignee: Atotech Deutschland GmbH
- Current Assignee: Atotech Deutschland GmbH
- Current Assignee Address: DE Berlin
- Agency: Renner, Otto, Boisselle & Sklar, LLP
- Priority: EP15196799 20151127
- International Application: PCT/EP2016/079008 WO 20161128
- International Announcement: WO2017/089610 WO 20170601
- Main IPC: C23C18/44
- IPC: C23C18/44 ; C23C18/16 ; H05K3/18 ; H01L21/288 ; H05K3/24 ; C23C18/32

Abstract:
The invention relates to an aqueous plating bath composition and a method for depositing a palladium layer by electroless plating onto a substrate. The aqueous plating bath composition according to the invention comprises a source for palladium ions, a reducing agent for palladium ions and an unsaturated compound. The aqueous plating bath composition according to the invention has an improved stability against undesired decomposition due to the unsaturated compounds while keeping the deposition rate for palladium at the desired satisfying value. The aqueous plating bath composition has also a prolonged life time. The unsaturated compounds of the invention allow for adjusting the deposition rate to a satisfying range over the bath life time and for electrolessly depositing palladium layers at lower temperatures.
Public/Granted literature
- US20180340260A1 PLATING BATH COMPOSITION AND METHOD FOR ELECTROLESS PLATING OF PALLADIUM Public/Granted day:2018-11-29
Information query
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