Invention Grant
- Patent Title: Fin field effect transistor (FinFET) device structure and method for forming the same
-
Application No.: US15669013Application Date: 2017-08-04
-
Publication No.: US10515952B2Publication Date: 2019-12-24
- Inventor: Chung-Shu Wu , Shu-Uei Jang , Wei-Yeh Tang , Ryan Chia-Jen Chen , An-Chyi Wei
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L21/8234 ; H01L21/768 ; H01L21/311 ; H01L29/161

Abstract:
A FinFET device structure and method for forming the same are provided. The FinFET device structure includes a first fin structure extending above a substrate, and the first fin structure includes a portion made of silicon germanium (SiGe). The FinFET device structure includes a second fin structure adjacent to the first fin structure. The FinFET device structure also includes a first liner layer formed on the outer sidewall surface of the first fin structure and a second liner layer formed on the inner sidewall surface of the first fin structure. The FinFET device structure further includes a first isolation structure formed on the substrate, and the first liner layer is between the first isolation structure and the first fin structure, and a top surface of the second liner layer is higher than a top surface of the first liner layer.
Public/Granted literature
- US20190043857A1 FIN FIELD EFFECT TRANSISTOR (FINFET) DEVICE STRUCTURE AND METHOD FOR FORMING THE SAME Public/Granted day:2019-02-07
Information query
IPC分类: