Invention Grant
- Patent Title: Semiconductor device
-
Application No.: US15869522Application Date: 2018-01-12
-
Publication No.: US10522682B2Publication Date: 2019-12-31
- Inventor: Chang Seop Yoon , Byung Ha Choi , Dae Geun Kim , Su Min Kim , Se Wan Park , Ji Ho Lee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel, P.A.
- Priority: KR10-2017-0098997 20170804
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/768 ; H01L29/417 ; H01L27/088 ; H01L21/8238 ; H01L27/092

Abstract:
A semiconductor device is provided. The semiconductor device includes a fin type pattern, a field insulating film on a part of a sidewall of the fin-type pattern, and a gate electrode intersecting with the fin-type pattern, on the fin-type pattern and the field insulating film. The gate electrode on the field insulating film includes a first portion, a second portion, and a third portion on the field insulating film. A first width of the first portion increases as a first distance from the field insulating film, increases width of the second portion decreases as a second distance from the field insulating film increases, and a third width of the third portion increases or is substantially constant as a third distance from the field insulating film increases.
Public/Granted literature
- US20190043981A1 SEMICONDUCTOR DEVICE Public/Granted day:2019-02-07
Information query
IPC分类: