Invention Grant
- Patent Title: Low damage self-aligned amphoteric FINFET tip doping
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Application No.: US15579180Application Date: 2015-06-27
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Publication No.: US10546858B2Publication Date: 2020-01-28
- Inventor: Jack T. Kavalieros , Chandra S. Mohapatra , Anand S. Murthy , Willy Rachmady , Matthew V. Metz , Gilbert Dewey , Tahir Ghani , Harold W. Kennel
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Green, Howard & Mughal LLP
- International Application: PCT/US2015/038197 WO 20150627
- International Announcement: WO2017/003414 WO 20170105
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L29/08 ; H01L29/78 ; H01L27/06 ; H01L21/306 ; H01L29/66 ; H01L21/225 ; H01L21/324 ; H01L21/8258 ; H01L29/205 ; H01L29/207

Abstract:
Monolithic finFETs including a majority carrier channel in a first III-V compound semiconductor material disposed on a second III-V compound semiconductor. While a mask, such as a sacrificial gate stack, is covering the channel region, a source of an amphoteric dopant is deposited over exposed fin sidewalls and diffused into the first III-V compound semiconductor material. The amphoteric dopant preferentially activates as a donor within the first III-V material and an acceptor with the second III-V material, providing transistor tip doping with a p-n junction between the first and second III-V materials. A lateral spacer is deposited to cover the tip portion of the fin. Source/drain regions in regions of the fin not covered by the mask or spacer electrically couple to the channel through the tip region. The channel mask is replaced with a gate stack.
Public/Granted literature
- US20180226405A1 LOW DAMAGE SELF-ALIGNED AMPHOTERIC FINFET TIP DOPING Public/Granted day:2018-08-09
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