Invention Grant
- Patent Title: Nonvolatile memory device and method for fabricating the same
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Application No.: US15634597Application Date: 2017-06-27
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Publication No.: US10546872B2Publication Date: 2020-01-28
- Inventor: Soodoo Chae , Myoungbum Lee , HuiChang Moon , Hansoo Kim , JinGyun Kim , Kihyun Kim , Siyoung Choi , Hoosung Cho
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel, P.A.
- Priority: KR10-2008-0121886 20081203; KR10-2009-0016406 20090226
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11578 ; H01L27/11575 ; H01L23/498 ; H01L23/535 ; H01L29/40 ; H01L29/423 ; H01L23/522 ; H01L27/11565

Abstract:
A three-dimensional nonvolatile memory device and a method for fabricating the same include a semiconductor substrate, a plurality of active pillars, a plurality of gate electrodes, and a plurality of supporters. The semiconductor substrate includes a memory cell region and a contact region. The active pillars extend in the memory cell region perpendicularly to the semiconductor substrate. The gate electrodes intersect the active pillars, extend from the memory cell region to the contact region and are stacked on the semiconductor substrate. The supporters extend in the contact region perpendicularly to the semiconductor substrate to penetrate at least one or more of the gate electrodes.
Public/Granted literature
- US20170301690A1 NONVOLATILE MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2017-10-19
Information query
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