Invention Grant
- Patent Title: Glass ceramic for ultraviolet lithography and method of manufacturing thereof
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Application No.: US15107054Application Date: 2014-12-19
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Publication No.: US10551731B2Publication Date: 2020-02-04
- Inventor: Ralf Hofmann , Majeed Foad , Cara Beasley
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Servilla Whitney LLC
- International Application: PCT/US2014/071690 WO 20141219
- International Announcement: WO2015/095803 WO 20150625
- Main IPC: C23C16/34
- IPC: C23C16/34 ; G03F1/22 ; C23C16/40 ; C03C17/245
Abstract:
An extreme ultraviolet mask and method of manufacture thereof includes: providing a glass-ceramic block; forming a glass-ceramic substrate from the glass-ceramic block; and depositing a planarization layer on the glass-ceramic substrate.
Public/Granted literature
- US20160377972A1 GLASS CERAMIC FOR ULTRAVIOLET LITHOGRAPHY AND METHOD OF MANUFACTURING THEREOF Public/Granted day:2016-12-29
Information query
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