Invention Grant
- Patent Title: Transport apparatus
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Application No.: US16201539Application Date: 2018-11-27
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Publication No.: US10556351B2Publication Date: 2020-02-11
- Inventor: Ulysses Gilchrist , Jairo Terra Moura
- Applicant: Brooks Automation, Inc.
- Applicant Address: US MA Chelmsford
- Assignee: BROOKS AUTOMATION, INC.
- Current Assignee: BROOKS AUTOMATION, INC.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green
- Main IPC: B25J15/00
- IPC: B25J15/00 ; H01L21/687 ; H01L21/677 ; B25J18/00

Abstract:
A substrate transport apparatus for transporting substrates, the substrate transport apparatus including a frame, at least one transfer arm connected to the frame, at least one end effector mounted to the at least one transfer arm and at least one substrate support pad disposed on the at least one end effector, the at least one substrate support pad has a configuration that effects increased friction force, resulting from an increased friction coefficient, in at least one predetermined direction.
Public/Granted literature
- US20190160690A1 TRANSPORT APPARATUS Public/Granted day:2019-05-30
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