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公开(公告)号：US11164769B2
公开(公告)日：2021-11-02
申请号：US16942255
申请日：2020-07-29
Applicant: BROOKS AUTOMATION, INC.
Inventor： Jairo Terra Moura
Abstract: A substrate transport apparatus includes a transport chamber, a drive section, a robot arm, an imaging system with a camera mounted through a mounting interface of the drive section in a predetermined location with respect to the transport chamber and disposed to image part of the arm, and a controller connected to the imaging system and configured to image, with the camera, the arm moving to or in the predetermined location, the controller effecting capture of a first image of the arm on registry of the arm proximate to or in the predetermined location, the controller is configured to calculate a positional variance of the arm from comparison of the first image with a calibration image of the arm, and determine a motion compensation factor changing an extended position of the arm. Each camera effecting capture of the first image is disposed inside the perimeter of the mounting interface.
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公开(公告)号：US20130028700A1
公开(公告)日：2013-01-31
申请号：US13646282
申请日：2012-10-05
Applicant: BROOKS AUTOMATION, INC.
Inventor： Ulysses Gilchrist , Martin Hosek , Jairo Terra Moura , Jay Krishnasamy , Christopher Hofmeister
IPC: H01L21/677 , B25J18/00
CPC classification number: H02K7/09 , H02K29/03 , Y10S901/15 , Y10S901/23 , Y10T74/20305 , Y10T74/20317 , Y10T74/20329
Abstract: A drive section for a substrate transport arm including a frame, at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section and a coaxial spindle magnetically supported substantially without contact by the at least one stator bearing section, where each drive shaft of the coaxial spindle includes a rotor, the rotor including a second motor section and at least one rotor bearing section configured to interface with the at least one stator bearing section, wherein the first motor section is configured to interface with the second motor section to effect rotation of the spindle about a predetermined axis and the at least one stator bearing section is configured to effect at least leveling of a substrate transport arm end effector connected to the coaxial spindle through an interaction with the at least one rotor bearing section.
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Patent Agency Ranking
公开(公告)号：US11420337B2
公开(公告)日：2022-08-23
申请号：US16787184
申请日：2020-02-11
Applicant: Brooks Automation, Inc.
Inventor： Ulysses Gilchrist , Jairo Terra Moura
IPC: H01L21/67 , B25J15/00 , H01L21/687 , H01L21/677 , B25J18/00
Abstract: A substrate transport apparatus for transporting substrates, the substrate transport apparatus including a frame, at least one transfer arm connected to the frame, at least one end effector mounted to the at least one transfer arm and at least one substrate support pad disposed on the at least one end effector, the at least one substrate support pad has a configuration that effects increased friction force, resulting from an increased friction coefficient, in at least one predetermined direction.
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公开(公告)号：US09024488B2
公开(公告)日：2015-05-05
申请号：US13646282
申请日：2012-10-05
Applicant: Brooks Automation, Inc.
Inventor： Ulysses Gilchrist , Martin Hosek , Jairo Terra Moura , Jay Krishnasamy , Christopher Hofmeister
CPC classification number: H02K7/09 , H02K29/03 , Y10S901/15 , Y10S901/23 , Y10T74/20305 , Y10T74/20317 , Y10T74/20329
Abstract: A drive section for a substrate transport arm including a frame, at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section and a coaxial spindle magnetically supported substantially without contact by the at least one stator bearing section, where each drive shaft of the coaxial spindle includes a rotor, the rotor including a second motor section and at least one rotor bearing section configured to interface with the at least one stator bearing section, wherein the first motor section is configured to interface with the second motor section to effect rotation of the spindle about a predetermined axis and the at least one stator bearing section is configured to effect at least leveling of a substrate transport arm end effector connected to the coaxial spindle through an interaction with the at least one rotor bearing section.
Abstract translation: 一种用于基板输送臂的驱动部分，包括框架，至少一个定子，其安装在框架内，该定子包括第一马达部分和至少一个定子轴承部分和同轴主轴，所述至少一个定子轴承部分和基本上不被所述至少一个定子 其中所述同轴心轴的每个驱动轴包括转子，所述转子包括第二电动机部分和至少一个转子轴承部分，所述至少一个转子轴承部分构造成与所述至少一个定子轴承部分相接合，其中所述第一电动机部分被配置为接合 所述第二马达部分绕所述心轴绕预定轴线进行旋转，并且所述至少一个定子支承部分构造成通过与所述至少一个相互作用的至少一个相互作用来实现连接到所述同轴心轴的基底输送臂端部执行器的至少调平 转子轴承部分。
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公开(公告)号：US10556351B2
公开(公告)日：2020-02-11
申请号：US16201539
申请日：2018-11-27
Applicant: Brooks Automation, Inc.
Inventor： Ulysses Gilchrist , Jairo Terra Moura
IPC: B25J15/00 , H01L21/687 , H01L21/677 , B25J18/00
Abstract: A substrate transport apparatus for transporting substrates, the substrate transport apparatus including a frame, at least one transfer arm connected to the frame, at least one end effector mounted to the at least one transfer arm and at least one substrate support pad disposed on the at least one end effector, the at least one substrate support pad has a configuration that effects increased friction force, resulting from an increased friction coefficient, in at least one predetermined direction.
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公开(公告)号：US10137576B2
公开(公告)日：2018-11-27
申请号：US14365277
申请日：2012-12-17
Applicant: Brooks Automation, Inc.
Inventor： Ulysses Gilchrist , Jairo Terra Moura
IPC: H01L21/687 , B25J15/00 , H01L21/677 , B25J18/00
Abstract: A substrate transport apparatus for transporting substrates, the substrate transport apparatus including a frame, at least one transfer arm connected to the frame, at least one end effector mounted to the at least one transfer arm and at least one substrate support pad disposed on the at least one end effector, the at least one substrate support pad has a configuration that effects increased friction force, resulting from an increased friction coefficient, in at least one predetermined direction.
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公开(公告)号：US20140301818A1
公开(公告)日：2014-10-09
申请号：US14365277
申请日：2012-12-17
Applicant: Brooks Automation, Inc.
Inventor： Ulysses Gilchrist , Jairo Terra Moura
CPC classification number: B25J15/00 , B25J18/00 , H01L21/67742 , H01L21/67766 , H01L21/68707 , H01L21/6875 , H01L21/68757 , Y10S901/30
Abstract: A substrate transport apparatus for transporting substrates, the substrate transport apparatus including a frame, at least one transfer arm connected to the frame, at least one end effector mounted to the at least one transfer arm and at least one substrate support pad disposed on the at least one end effector, the at least one substrate support pad has a configuration that effects increased friction force, resulting from an increased friction coefficient, in at least one predetermined direction.
Abstract translation: 一种用于输送基板的基板输送装置，所述基板输送装置包括框架，至少一个连接到所述框架的传送臂，安装在所述至少一个传送臂上的至少一个端部执行器和设置在所述至少一个传送臂上的至少一个基板支撑垫 至少一个末端执行器，所述至少一个基板支撑垫具有在至少一个预定方向上由增加的摩擦系数引起的增加的摩擦力的构造。
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