-
公开(公告)号：US20230029442A9
公开(公告)日：2023-01-26
申请号：US16197107
申请日：2018-11-20
IPC分类号： H01L21/677
摘要： A transfer apparatus including a frame, multiple arms connected to the frame, each arm having an end effector and an independent drive axis for extension and retraction of the respective arm with respect to other ones of the multiple arms, a linear rail defining a degree of freedom for the independent drive axis for extension and retraction of at least one arm, and a common drive axis shared by each arm and configured to pivot the multiple arms about a common pivot axis, wherein at least one of the multiple arms having another drive axis defining an independent degree of freedom with respect to other ones of the multiple arms.
-
公开(公告)号：US11201073B2
公开(公告)日：2021-12-14
申请号：US14469260
申请日：2014-08-26
发明人： Ulysses Gilchrist
IPC分类号： H01L21/67 , H01L21/677 , B25J9/04 , B25J18/04
摘要： A substrate processing apparatus comprising a transport arm having serially connected arm links, at least one of the arm links having a predetermined arm link height, at least a first pulley and a second pulley, where the second pulley is fixed to an arm link of the serially connected arm links, and at least one torque transmission band extending longitudinally between and coupled to each of the first pulley and the second pulley, the at least one torque transmission band having a corresponding band height for the predetermined arm link height and a variable lateral thickness such that the at least one torque transmission band includes a segment of laterally increased cross section for the corresponding band height.
-
公开(公告)号：US10406679B2
公开(公告)日：2019-09-10
申请号：US15012425
申请日：2016-02-01
IPC分类号： B25J9/04 , H01L21/677
摘要： A substrate transport apparatus comprising a drive section, a controller, an upper arm, forearm and substrate holder. A proximate end of the upper arm being rotatably mounted to the drive section at a shoulder joint. A proximate end of the forearm being rotatably mounted to a distal end of the upper arm at an elbow joint. The substrate holder being rotatably mounted to a distal end of the forearm at a wrist joint. The upper arm and the forearm being unequal in length from joint center to joint center. The substrate transport arm is adapted to transport substrate to and from at least two substrate holding areas with the drive section of the transport apparatus remaining in a fixed position relative to the holding areas. Each of the upper arm, forearm and substrate holder being independently rotatable with respect to each other.
-
公开(公告)号：US10325795B2
公开(公告)日：2019-06-18
申请号：US15849002
申请日：2017-12-20
IPC分类号： H01L21/677 , B25J9/04 , B25J11/00 , B25J18/04
摘要： A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.
-
公开(公告)号：US20190096726A1
公开(公告)日：2019-03-28
申请号：US16201899
申请日：2018-11-27
IPC分类号： H01L21/677 , H01L21/687 , B25J18/00 , B25J9/04
摘要： A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.
-
公开(公告)号：US09881825B2
公开(公告)日：2018-01-30
申请号：US14541934
申请日：2014-11-14
发明人： Ulysses Gilchrist , Michael L. Bufano , William Fosnight , Christopher Hofmeister , Gerarld M. Friedman
IPC分类号： H01L21/677 , H01L21/673
CPC分类号： H01L21/67763 , H01L21/67326 , H01L21/67353 , H01L21/67369 , H01L21/67373 , H01L21/67376 , H01L21/67383 , H01L21/67389 , H01L21/67393 , H01L21/67772 , H01L21/67778 , H01L21/6779 , Y10S414/139
摘要： A substrate transport apparatus is provided. The apparatus has a casing and a door. The casing is adapted to form a controlled environment therein. The casing has supports therein for holding at least one substrate in the casing. The casing defines a substrate transfer opening through which a substrate transport system accesses the substrate in the casing. The door is connected to the casing for closing the substrate transfer opening in the casing. The casing has structure forming a fast swap element allowing replacement of the substrate from the apparatus with another substrate without retraction of the substrate transport system and independent of substrate loading in the casing.
-
公开(公告)号：US20160329234A1
公开(公告)日：2016-11-10
申请号：US15215143
申请日：2016-07-20
IPC分类号： H01L21/687 , B25J9/04 , B25J11/00 , H01L21/67
CPC分类号： H01L21/68707 , B25J9/042 , B25J11/0095 , B25J18/00 , H01L21/67161 , H01L21/67184 , H01L21/67196 , H01L21/67742
摘要： A transfer apparatus for transporting substrates in a transfer chamber having a first and second ends and two sides extending between the ends. The transfer apparatus includes a drive section, at least one base arm fixed at one end with respect to the transfer chamber and including at least one arm link rotatably coupled to the drive section and at least one transfer arm rotatably coupled to a common end of the base arm, the at least one transfer arm has two end effectors. The drive section has motors with three independent axes of rotation defining three degrees of freedom. One degree of freedom moves the at least one base arm horizontally for transporting the at least one transfer arm and two degrees of freedom drives the at least one transfer arm to extend and retract the at least one transfer arm and swap the two end effectors.
-
公开(公告)号：US09401294B2
公开(公告)日：2016-07-26
申请号：US14058436
申请日：2013-10-21
IPC分类号： H01L21/677 , H01L21/67
CPC分类号： H01L21/677 , H01L21/6719 , H01L21/67201 , H01L21/67742 , H01L21/67766 , H01L21/67775
摘要： A substrate processing system including a load port module configured to hold at least one substrate container for storing and transporting substrates, a substrate processing chamber, an isolatable transfer chamber capable of holding an isolated atmosphere therein configured to couple the substrate processing chamber and the load port module, and a substrate transport mounted at least partially within the transfer chamber having a drive section fixed to the transfer chamber and having a SCARA arm configured to support at least one substrate, the SCARA arm being configured to transport the at least one substrate between the at least one substrate container and the processing chamber with but one touch of the at least one substrate, wherein the SCARA arm comprises a first arm link, a second arm link, and at least one end effector serially pivotally coupled to each other, where the first and second arm links have unequal lengths.
-
公开(公告)号：US09368382B2
公开(公告)日：2016-06-14
申请号：US14223553
申请日：2014-03-24
发明人： Gerald M. Friedman , Michael L. Bufano , Christopher Hofmeister , Ulysses Gilchrist , William Fosnight
IPC分类号： B65G47/10 , H01L21/677 , B65G47/50 , H01L21/67
CPC分类号： H01L21/677 , B65G47/50 , H01L21/67276 , H01L21/67769 , H01L21/67772 , H01L21/67775 , Y10S414/14
摘要： A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station.
摘要翻译： 提供了一种基板处理装置。 该装置具有壳体，低端口接口和载体保持站。 壳体具有用于处理基板的处理装置。 负载端口接口连接到外壳，用于将基板装载到处理设备中。 托架保持站连接到外壳。 载体保持站用于保持至少一个基板输送载体，使得至少一个基板输送载体能够耦合到负载端口接口，而不将至少一个基板传输载体从载体保持站提起。 载体保持站布置成提供基本上同时的交换部分，用于基本上同时从载体保持站更换基板传输载体。
-
公开(公告)号：US20160164382A1
公开(公告)日：2016-06-09
申请号：US14540058
申请日：2014-11-13
IPC分类号： H02K11/215 , H01L21/687 , H02K1/14 , H01L21/677 , H02K5/128 , H02K1/24
摘要： A transport apparatus including a housing, a drive mounted to the housing, and at least one transport arm connected to the drive, where the drive includes at least one rotor having at least one salient pole of magnetic permeable material and disposed in an isolated environment, at least one stator having at least one salient pole with corresponding coil units and disposed outside the isolated environment where the at least one salient pole of the at least one stator and the at least one salient pole of the rotor form a closed magnetic flux circuit between the at least one rotor and the at least one stator, at least one seal partition configured to isolate the isolated environment, and at least one sensor including a magnetic sensor member connected to the housing, at least one sensor track connected to the at least one rotor where the at least one seal partition is disposed between and separates the magnetic sensor member and the at least one sensor track so that the at least one sensor track is disposed in the isolated environment and the magnetic sensor member is disposed outside the isolated environment.
摘要翻译： 一种运输装置，包括壳体，安装到壳体的驱动器和连接到驱动器的至少一个输送臂，其中驱动器包括至少一个转子，该转子具有至少一个磁性可渗透材料的凸极并且设置在隔离环境中， 至少一个定子具有至少一个具有对应的线圈单元的凸极并且设置在所述隔离环境的外部，其中所述至少一个定子的至少一个凸极和所述转子的所述至少一个凸极形成闭合磁通电路， 所述至少一个转子和所述至少一个定子，被配置为隔离所述隔离环境的至少一个密封分隔件，以及包括连接到所述壳体的磁性传感器构件的至少一个传感器，连接到所述至少一个的至少一个传感器轨道 转子，其中所述至少一个密封分隔件设置在所述磁性传感器构件和所述至少一个传感器轨道之间，并且使所述至少一个感测体 r轨道设置在隔离环境中，并且磁传感器构件设置在隔离环境的外部。
-
-
-
-
-
-
-
-
-
搜索结果
59 条记录 (耗时 0.034 秒)
