Invention Grant
- Patent Title: Wrap-all-around contact for nanosheet-FET and method of forming same
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Application No.: US15968968Application Date: 2018-05-02
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Publication No.: US10559656B2Publication Date: 2020-02-11
- Inventor: Emilie M. S. Bourjot , Julien Frougier , Yi Qi , Ruilong Xie , Hui Zang , Hsien-Ching Lo , Zhenyu Hu
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent Anthony Canale
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/417 ; H01L29/78 ; H01L29/66 ; H01L29/08 ; H01L21/285

Abstract:
Described herein are nanosheet-FET structures having a wrap-all-around contact where the contact wraps entirely around the S/D epitaxy structure, thereby increasing contact area and ultimately allowing for improved S/D contact resistance. Other aspects described include nanosheet-FET structures having an air gap as a bottom isolation area to reduce parasitic S/D leakage to the substrate.
Public/Granted literature
- US20190341448A1 WRAP-ALL-AROUND CONTACT FOR NANOSHEET-FET AND METHOD OF FORMING SAME Public/Granted day:2019-11-07
Information query
IPC分类: