Invention Grant
- Patent Title: Developer, pattern forming method, and electronic device manufacturing method
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Application No.: US15849690Application Date: 2017-12-21
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Publication No.: US10562991B2Publication Date: 2020-02-18
- Inventor: Hideaki Tsubaki , Toru Tsuchihashi , Wataru Nihashi
- Applicant: FUJIFILM Corporation
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: JCIPRNET
- Priority: JP2015-125623 20150623; JP2015-233771 20151130
- Main IPC: G03F7/32
- IPC: G03F7/32 ; G03F7/038 ; G03F7/039 ; C08F12/24 ; C09D125/18 ; C08F12/22 ; C08F212/14 ; H01L21/027

Abstract:
Provided is a pattern forming method including the successive steps of: a resist film forming step of forming a resist film using an actinic ray-sensitive or radiation-sensitive composition; an exposure step of exposing the resist film; a step of developing the exposed resist film using a developer, and a step of rinsing the developed resist film using a rinsing liquid containing an organic solvent. The developer includes a ketone-based or ether-based solvent having a branched alkyl group. The organic solvent contained in the rinsing liquid includes an ether-based solvent having a branched alkyl group.
Public/Granted literature
- US20180186907A1 DEVELOPER, PATTERN FORMING METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD Public/Granted day:2018-07-05
Information query
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