Invention Grant
- Patent Title: Vacuum valve
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Application No.: US15571713Application Date: 2016-04-14
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Publication No.: US10563775B2Publication Date: 2020-02-18
- Inventor: Bae-Jin Kim , Sang Min Kim , Ki Sun Choi , Kang Hyun Kim
- Applicant: PRESYS.CO., LTD
- Applicant Address: KR Suwon
- Assignee: PRESYS.CO., LTD
- Current Assignee: PRESYS.CO., LTD
- Current Assignee Address: KR Suwon
- Agency: Patentfile, LLC
- Agent Bradley C. Fach; Steven R. Kick
- Priority: KR10-2015-0062477 20150504
- International Application: PCT/KR2016/003883 WO 20160414
- International Announcement: WO2016/178480 WO 20161110
- Main IPC: F16K3/18
- IPC: F16K3/18 ; F16K3/02 ; F16K51/02 ; H01L21/67

Abstract:
The present invention relates to a vacuum valve, and more particularly, to a vacuum valve including a valve housing with a blade, a main shaft, a vertical moving part, a horizontal moving part, a horizontal moving unit, and a main body bracket. Opening and closing guide holes are obliquely formed in both side surfaces such that cam rollers, having passed through the vertical moving guide grooves, are inserted into the grooves so as to guide the fore and aft movement of the blade according to the vertical movement of the horizontal moving unit.
Public/Granted literature
- US20180156340A1 VACUUM VALVE Public/Granted day:2018-06-07
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