- 专利标题: Magnetic tunnel junction memory device with stress inducing layers
-
申请号: US16055695申请日: 2018-08-06
-
公开(公告)号: US10566041B2公开(公告)日: 2020-02-18
- 发明人: Jong-Koo Lim , Ku-Youl Jung , Jae-Hyoung Lee , Jeong-Myeong Kim , Tae-Young Lee
- 申请人: SK hynix Inc.
- 申请人地址: KR Icheon-si
- 专利权人: SK hynix Inc.
- 当前专利权人: SK hynix Inc.
- 当前专利权人地址: KR Icheon-si
- 代理机构: Perkins Coie LLP
- 优先权: KR10-2017-0114543 20170907
- 主分类号: H01L29/82
- IPC分类号: H01L29/82 ; G11C11/16 ; H01L43/08 ; H01L27/12 ; H01L43/02 ; H01L43/12 ; H01L43/10
摘要:
An electronic device may include a semiconductor memory, and the semiconductor memory may include a variable resistance element including a Magnetic Tunnel Junction (MTJ) structure including a free layer having a variable magnetization direction, a pinned layer having a fixed magnetization direction and a tunnel barrier layer interposed between the free layer and the pinned layer; a first protective layer disposed on a lower sidewall of the variable resistance element; and a second protective layer disposed on an upper sidewall of the variable resistance element, wherein any one layer of the first protective layer and the second protective layer may apply a compressive stress to the variable resistance element, and the other layer applies a tensile stress to the variable resistance element.
公开/授权文献
- US20190074042A1 ELECTRONIC DEVICE AND METHOD FOR FABRICATING THE SAME 公开/授权日:2019-03-07
信息查询
IPC分类: