Invention Grant
- Patent Title: Plating apparatus
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Application No.: US16380843Application Date: 2019-04-10
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Publication No.: US10577706B2Publication Date: 2020-03-03
- Inventor: Tomonori Hirao
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: BakerHostetler
- Priority: JP2013-063800 20130326; JP2013-069729 20130328
- Main IPC: C25D5/48
- IPC: C25D5/48 ; C25D17/06 ; C23C18/16 ; B65G45/26 ; B65G45/24 ; B65G45/10 ; B65G45/22 ; C25D17/00 ; C25D21/02 ; C25D21/04 ; C25D21/06

Abstract:
A plating apparatus includes a processing bath configured to store a processing liquid therein, a transporter configured to immerse a substrate holder, holding a substrate, in the processing liquid, raise the substrate holder out of the processing bath, and transport the substrate holder in a horizontal direction, and a gas flow generator configured to generate a clean gas flow forward of the substrate with respect to a direction in which the substrate holder is transported. The transporter moves the gas flow generator together with the substrate holder in the horizontal direction while transporting the substrate holder in the horizontal direction.
Public/Granted literature
- US20190233964A1 PLATING APPARATUS Public/Granted day:2019-08-01
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